基于单光子雪崩二极管的成像技术综述  

Overview of imaging technology based on single photon avalanche diode

作　　者：王哲[1,2] 田娜 杨旭 冯鹏 窦润江[1,2] 于双铭 刘剑 吴南健 刘力源[1,3] WANG Zhe;TIAN Na;YANG Xu;FENG Peng;DOU Runjiang;YU Shuangming;LIU Jian;WU Nanjian;LIU Liyuan(Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China;College of Materials Science and Opto-Electronics Technology,University of Chinese Academy of Sciences,Beijing 100049,China;School of Electronic,Electrical and Communication Engineering,University of Chinese Academy of Sciences,Beijing 100049,China)

机构地区：[1]中国科学院半导体研究所半导体超晶格国家重点实验室,北京100083 [2]中国科学院大学材料科学与光电技术学院,北京100049 [3]中国科学院大学电子电气与通信工程学院,北京100049

出　　处：《集成电路与嵌入式系统》2024年第5期10-25,共16页INTEGRATED CIRCUITS AND EMBEDDED SYSTEMS

基　　金：科技创新2030重大项目(2021ZD0109801);北京市科技计划(Z221100007722028)。

摘　　要：单光子成像技术涉及半导体工艺、光电器件以及集成电路设计等多个方面,基于单光子雪崩二极管的成像技术具有高动态二维灰度成像、高精度三维成像和荧光寿命成像能力,在安防监控、自动驾驶和生物医疗等领域具有广阔的应用前景。伴随着半导体工艺技术的飞速发展,单光子成像技术有望成为应用广泛的下一代视觉感知技术。本文对基于单光子雪崩二极管的成像技术进行了系统的介绍,包括单光子雪崩二极管器件、单光子成像涉及的关键电路以及二维灰度和时间分辨单光子图像传感器的最新研究进展。Single-photon imaging technology involves multiple aspects such as semiconductor processes,optoelectronic devices,and integrated circuit design.Based on single-photon avalanche diodes,single-photon imaging technology offers high dynamic two-dimensional grayscale imaging,high-precision three-dimensional imaging,and fluorescence lifetime imaging capabilities.It has significant application prospects in fields such as security surveillance,autonomous driving,and biomedicine.With the rapid development of semiconductor process technology,single-photon imaging technology is expected to become a widely used next-generation visual perception technology.This article provides a systematic introduction to imaging technology based on single-photon avalanche diodes,including the device structure of single-photon avalanche diodes,key circuits involved in single-photon imaging,and the latest research progress in gray scale and temporal resolution single-photon image sensors.

关 键 词：单光子雪崩二极管 CMOS图像传感器 单光子成像 三维成像 荧光寿命成像 

分 类 号：TN4[电子电信—微电子学与固体电子学]