带宽超30 GHz的850 nm方形横向耦合腔VCSEL  

850 nm Square Transversely Coupled Cavity VCSEL with Bandwidth Over 30 GHz

作　　者：佟海霞 王延靖 田思聪[2] 蒋宁 李浩 佟存柱[2,3] 魏志鹏 TONG Haixia;WANG Yanjing;TIAN Sicong;JIANG Ning;LI Hao;TONG Cunzhu;WEI Zhipeng(State Key Laboratory of High Power Semiconductor Lasers,School of Physics,Changchun University of Science and Technology,Changchun 130022,China;State Key Laboratory of Luminescence and Applications,Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences,Changchun 130033,China;Jlight Semiconductor Technology Co.,Ltd,Changchun 130031,China)

机构地区：[1]长春理工大学物理学院,高功率半导体激光国家重点实验室,吉林长春130022 [2]中国科学院长春光学精密机械与物理研究所,发光学及应用国家重点实验室,吉林长春130033 [3]吉光半导体科技有限公司,吉林长春130031

出　　处：《发光学报》2024年第3期493-499,共7页Chinese Journal of Luminescence

基　　金：国家重点研发计划(2021YFB2801000)。

摘　　要：如今,人们对研究耦合腔面发射激光器结构的兴趣逐渐增加。这种结构通过向主腔施加调制电的同时向每个反馈腔施加直流电来实现带宽提升。然而,单独驱动主腔对器件性能的影响尚未得到深入研究。为了更全面地了解耦合腔激光器,我们设计并制备了边长为30μm×30μm的方形横向耦合腔VCSEL,并研究了在方形横向耦合腔中单独驱动主腔时器件性能的变化。室温下,-3 dB带宽达30.1 GHz,在非归零调制下,在背对背传输速率40 Gbit/s时获得清晰的眼图,相对强度噪声值为-160 dB/Hz。证明了反馈腔在不加驱动的条件下仍会对主腔的性能提供正向作用。设计的TCC-VCSEL器件只需要一个电源驱动,使其适用于高密度集成,为封装集成应用提供了新的思路。Nowadays,there is a growing interest in studying coupled cavity structures in vertical-cavity surfaceemitting lasers(VCSEL).These structures achieve a bandwidth enhance by adding a modulated current to the main cavity and a direct current to each feedback cavity.However,the impact on device performance when the main cavi⁃ty is driven separately has not been thoroughly investigated.To gain a more comprehensive understanding of coupled cavity lasers,we designed and fabricated a square transverse-coupled-cavity VCSEL(TCC-VCSEL)with a side length of 30μm×30μm and investigated the variation of the device performance when the main cavity is driven sepa⁃rately.At room temperature,the-3 dB bandwidth was up to 30.1 GHz,under non-return-to-zero(NRZ)modula⁃tion,clear eye diagrams were obtained at a back-to-back transmission rate of 40 Gbit/s,and relative intensity noise(RIN)was-160 dB/Hz.It has been proven that a feedback cavity can have a positive impact on the characteristics of the main cavity,even without driving conditions.The TCC-VCSEL device only requires one power supply,making it highly practical for high-density integration and providing new ideas for package integration applications.

关 键 词：垂直腔面发射激光器 横向耦合腔 高速 

分 类 号：TN248.4[电子电信—物理电子学]