缓冲层和保护层对Ta(Ti)/Co/Nb多层膜热稳定性影响  

Effect of buffer layer and protective layer on thermal stability of Ta(Ti)/Co/Nb multilayer films

作　　者：黄彦翔 任康 丁俊贤 贡佳伟 许文涛 赵文礼 李涛[1] 章健康 谢俊磊 徐耀鸿 丁泽豪 朱济生 李广[1,2] 王磊[1] HUANG Yan-xiang;REN Kang;DING Jun-Xian;GONG Jia-wei;XU Wen-tao;ZHAO Wen-li;LI-Tao;ZHANG Jian-kang;XIE Jun-lei;XU Yao-hong;DING Ze-hao;ZHU Ji-sheng;LI Guang;WANG Lei(School of Materials Science and Engineering,Anhui University,Hefei 230601,China;Anhui Key Laboratory of Information Materials and Devices,Anhui University,Hefei 230601,China)

机构地区：[1]安徽大学材料科学与工程学院,安徽合肥230601 [2]安徽大学安徽省信息材料与器件重点实验室,安徽合肥230601

出　　处：《磁性材料及器件》2024年第2期5-11,共7页Journal of Magnetic Materials and Devices

基　　金：国家自然科学基金项目(51371007,11674001);国家重点研发计划项目(2017YFA0403503);安徽省高校自然科学研究重点项目(2017YFA0403503);安徽省大学生创新创业计划项目(KJ2020A0006,S202110357046)。

摘　　要：采用磁控溅射法制备底层(BL)/钴(Co)/顶层(CL)三层膜,通过考察Co磁矩(M)与温度(T)的关系,系统分析了不同BL和CL对Co层热稳定性的影响。其中BL和CL分别为非磁性过渡金属钽(Ta)、钛(Ti)和铌(Nb)。研究发现,不同的非磁性底层和顶层材料对Co的热稳定性有着不同的影响,其中Ti作为BL和CL时Co的热稳定性最好。此外,与BL相比,CL在Co层的M-T具有更重要的影响,相同的CL其Co具有类似M-T曲线。实验结果可以解释为非磁性BL和CL与Co之间存在的耦合相互作用。这揭示出在纳米级多层膜中,通常用于促进晶体结构和防止氧化的底部非磁性缓冲层和顶部保护层可能对其相邻的磁性层的磁性能产生影响。The bottom layer(BL)/cobalt(Co)/top layer(CL)three-layer film was prepared by magnetron sputtering,the thermal-stability of single Cobalt(Co)layer with variety adjacent bottom layer(BL)and capping layer(CL)was systematically studied by analyzing the magnetic moment temperature(T)-dependence behavior in the BL/Co/CL trilayers.Here,BL and CL represent the nonmagnetic transition metals(TMs)tantalum(Ta),titanium(Ti)and niobium(Nb).It is found that different non-magnetic bottom and top materials have different effects on the thermal stability of Co,and Co has the best thermal stability when Ti is used as BL and CL.In addition,compared with BL,CL has a more important effect on M-T in the Co layer,and the same CL has a similar M-T curve for Co.The experimental results can be interpreted as the coupling interaction between non-magnetic BL and CL and Co.This reveals that in nanoscale multilayer films,the bottom nonmagnetic buffer layer and the top protective layer,which are commonly used to promote crystal structure and prevent oxidation,may have an impact on the magnetic properties of their adjacent magnetic layers.

关 键 词：Ta(Ti)/Co/Nb多层膜 钴热稳定性 底层(缓冲层) 顶层(保护层) 

分 类 号：O484.43[理学—固体物理]