基于ZrO_(2)-SiO_(2)和介孔SiO_(2)凝胶膜制备可见光区双层减反射膜  

Preparation of double-layer visible region anti-reflective films based on ZrO_(2)-SiO_(2) and mesoporous SiO_(2) gel films

作　　者：汪文文 肖志葳 邓志文 贾红宝[1] 王颖 朱世海 WANG Wenwen;XIAO Zhiwei;DENG Zhiwen;JIA Hongbao;WANG Ying;ZHU Shihai(School of Science,University of Science and Technology Liaoning,Anshan 114051,China)

机构地区：[1]辽宁科技大学理学院,辽宁鞍山114051

出　　处：《辽宁科技大学学报》2024年第1期75-80,共6页Journal of University of Science and Technology Liaoning

基　　金：辽宁省教育厅项目(LJKMZ20220641,JYTMS20230949);辽宁科技大学实验室开放基金资助项目。

摘　　要：采用溶胶-凝胶法,以正丙醇锆、正硅酸四乙酯为原料,在乙醇体系中以原位混合方式成功制备ZrO_(2)-SiO_(2)混合溶胶,Zr摩尔分数为20%~80%。在熔融石英基底上镀制混合凝胶膜,所得ZrO_(2)-SiO_(2)薄膜折射率在1.55~1.75之间可调。以有序介孔SiO_(2)薄膜为外层,选择与之匹配的ZrO_(2)-SiO_(2)薄膜为内层,构建λ/4~λ/2双层宽谱带减反射涂层。根据实际膜层的光学常数进行双层膜的优化设计,成功制备出在可见光区平均透射率达到99.17%的双层减反射薄膜。ZrO_(2)-SiO_(2) hybrid sols were successfully prepared by sol-gel method using zirconium n-propanol and tetraethyl orthosilicate as precursors in ethanol solution,in which the Zr mole fraction was 20%~80%.The hybrid gel films were dip-coated on fused quartz substrates,and the refractive index values of the ZrO_(2)-SiO_(2) films were adjustable between 1.55 and 1.75.With ordered mesoporous SiO_(2) films as the top layer,λ/4~λ/2 double-layer wide broadband anti-reflective films were constructed by selecting the matched ZrO_(2)-SiO_(2) films as the bottom layer.According to the optimal design of the double-layer anti-reflective films based on op-tical constants of singl-layer films,the anti-reflective films were elaborately prepared and average trans-mittance of the films in the visible light region even reach 99.17%.

关 键 词：ZrO_(2)-SiO_(2)混合溶胶 溶胶-凝胶法 原位混合 减反射膜 

分 类 号：O484.5[理学—固体物理]