扫描电镜原位激光加热与高温成像研究  

In situ laser heating and high temperature imaging in scanning electron microscopy

作　　者：柴松 吕俊霞[1] 李隆玉 张跃飞 张泽[2] CHAI Song;LÜJunxia;LI Longyu;ZHANG Yuefei;ZHANG Ze(Department of Materials and Manufacturing,Beijing University of Technology,Beijing 100124;School of Materials Science and Engineering,Zhejiang University,Hangzhou Zhejiang 310027)

机构地区：[1]北京工业大学材料与制造学部,北京100124 [2]浙江大学材料科学与工程学院,浙江杭州310027

出　　处：《电子显微学报》2024年第2期200-207,共8页Journal of Chinese Electron Microscopy Society

基　　金：北京市自然科学基金重点项目(No.KZ202110005006).

摘　　要：扫描电子显微镜(SEM)原位研究材料高温组织与力学性能是近年来材料领域关注的一个重要方向,在扫描电子显微镜内进行原位加热实验可以直接揭示材料微观组织、力学性能与温度之间的关系。然而传统的电流加热方式在样品温度超过800℃时金属材料会释放出大量热电子,无法获得高质量图像。本研究开发了一种与SEM联用的激光加热台,该加热台使用激光作为加热源,可以对材料进行快速加热以及高分辨原位结构表征。本文详细介绍了激光加热台的设计原理并对加热台温度场进行有限元仿真模拟及分析,以镍基单晶高温合金为例,实现了1370℃原位高温成像,验证了该装置的主要功能。In-situ study of high-temperature microstructure and mechanical properties using scanning electron microscopy(SEM)is an important field of materials science.In-situ heating specimens in SEM directly determines the relationship among microstructure,mechanical property and temperature.However,it is difficult to obtain high-quality SEM images when the temperature of sample exceeds 800℃because metallic materials usually release a large number of hot electrons in the traditional way of current heating.In this study,a laser heating stage combined with SEM was introduced.The heating stage,employed a laser as the heating source,can rapidly heat a material and in-situ characterized the structure of the material at a high resolution.The design principle of the laser heating stage was introduced in detail.The temperature field of heating stage was analyzed using finite element simulation.In-situ experiments were also verified using nickel-based single crystal superalloys.The result showed that a high temperature of 1370℃with a high imaging resolution was realized.

关 键 词：扫描电子显微镜 激光加热台 高温成像 原位表征 

分 类 号：TG115.215.3[金属学及工艺—物理冶金] O532.25[金属学及工艺—金属学]