砷化镓一维光子晶体加速度计理论性能研究  

Theoretical Performance Study of GaAs 1D Photonic Crystal Accelerometer

作　　者：曲帅 黄堃[1,2] 程琳 QU Shuai;HUANG Kun;CHENG Lin(State Key Laboratory of Dynamic Testing Technology,North University of China,Taiyuan 030051;Upgrading Office of Modern College of Humanities and Sciences of Shanxi Normal University,Linfen 041000)

机构地区：[1]中北大学省部共建动态测试技术国家重点实验室,太原030051 [2]山西师范大学现代文理学院转设筹备处,临汾041000

出　　处：《舰船电子工程》2024年第2期188-192,共5页Ship Electronic Engineering

基　　金：国家自然科学基金项目(编号:61803349);山西省高校创新项目(编号:2019L0518);山西重点研发项目(编号:2093D121129)资助。

摘　　要：该系统与以往的光学传感器不同,系统中将一种新的材料—砷化镓—应用于光学微机电系统(MEMS)传感器。基于GaAs的特性和波长调制分析的特点,设计了一个适用于高频率领域的光学MEMS传感器。此外,还使用了ANSYS的有限元分析(FEA)方法和严谨的耦合波分析(RCWA)方法。与其他高频传感器的比较表明,所提出的传感器在测量范围广、灵敏度高、交轴轴灵敏度几乎为零等特性方面显示出优势。所提出的光学传感器的光学灵敏度为2.99276,机械灵敏度为0.54nm/g。第一共振频率为23658.6Hz,线性测量范围为±135g,传感系统的灵敏度为161.61nm/g,工作带宽为0~23.6kHz。The system differs from previous optical sensors in that a new material,gallium arsenide,is applied to an optical micro-electromechanical system(MEMS)sensor in the system.Based on the characteristics of GaAs and wavelength modulation analysis,an optical MEMS sensor suitable for high frequency fields is designed.In addition,the finite element analysis(FEA)method of ANSYS and the rigorous coupled wave analysis(RCWA)method are used.Compared with other high-frequency sensors,it shows that the proposed sensor has advantages in terms of characteristics such as wide measurement range,high sensitivity,and almost zero cross-axis axis sensitivity.The optical sensitivity of the proposed optical sensor is 2.99276 and the mechanical sensitivi⁃ty is 0.54nm/g.The first resonance frequency is 23658.6Hz,the linear measurement range is±135g,and the sensitivity of the sens⁃ing system is 161.61 nm/g with an operating bandwidth of 0~23.6kHz.

关 键 词：应用光学 速度与加速度计量 半导体材料(砷化镓) 高灵敏度 

分 类 号：O439[机械工程—光学工程] TB934[理学—光学] TM23[理学—物理]