基于钯金复合膜亚波长圆孔阵列的氢气传感器的理论研究  

Theoretical study of hydrogen sensor based on Pd/Au composite film subwavelength circular hole array

作　　者：张钰 赵郝鑫 徐贲 龚华平 康娟 赵春柳 ZHANG Yu;ZHAO Haoxin;XU Ben;GONG Huaping;KANG Juan;ZHAO Chunliu(College of Optical and Electronic Technology,China Jiliang University,Hangzhou,Zhejiang 31o018,China)

机构地区：[1]中国计量大学光学与电子科技学院,浙江杭州310018

出　　处：《光电子．激光》2024年第5期467-474,共8页Journal of Optoelectronics·Laser

基　　金：国家重点研发计划(2020YFF0217800);广东省信息光子技术重点实验室(广东工业大学)开放课题基金(GKPT20-04)资助项目。

摘　　要：提出了一种基于钯金(Pd/Au)复合膜的亚波长圆孔阵列结构的氢气传感模型,用于氢气泄漏及氢气浓度检测。利用时域有限差分法(finite-difference time-domain,FDTD)对该Pd/Au复合膜亚波长圆孔阵列结构进行模拟仿真,计算其复合膜的横纵截面电场能量分布及透射特性,并进一步分析在不同结构参数下该传感结构的异常光透射(extraordinary optical transmission,EOT)特性和传感特性。模拟结果表明:Pd/Au复合膜亚波长圆孔阵列结构可产生明显的EOT效应,形成两个突出的异常透射峰,记作峰Ⅰ、峰Ⅱ。当通入氢气时,钯(Pd)膜会吸收氢气引起Pd介电常数的变化,导致EOT特性发生改变,具体表现为波长和透射率的改变。氢气浓度由0%上升至4%时,峰Ⅰ和峰Ⅱ的透射率变化量分别可达到0.16和0.24。由于其透射率强度变化比较明显,因此可通过透射峰强度变化来实现对氢气浓度的监控和检测。本文所提出的基于Pd/Au复合膜的亚波长圆孔阵列结构的氢气传感器的圆孔结构加工简单,所镀的Pd膜很薄使传感器响应速度快,EOT效应使该结构信噪比(signal-to-noise ratio,SNR)高,可利用光电集成技术进行批量生产,具有很强的实用价值。A hydrogen sensing model with subwavelength circular hole array structure based on Pd/Au composite film was proposed to detect hydrogen leakage and hydrogen concentration.Finite-difference time-domain(FDTD)method was used to simulate the subwavelength circular hole array structure with the Pd/Au composite film.The electric field energy distribution and transmission characteristics of the composite film cross and vertical section were calculated,and the extraordinary optical transmission(EOT)characteristics and sensing characteristics of the sensor structure were further analyzed under different structural parameters.The simulation results show that the subwavelength circular hole array structure with Pd/Au composite film can produce obvious EOT effect,and there are two prominent abnormal transmission peaks,denoted as peakⅠand peakⅡ.When the hydrogen in the environment,the palladium(Pd)film will absorb hydrogen and cause the change of Pd dielectric constant,which leads to the change of EOT characteristics,especially the change of wavelength and transmittance.When the hydrogen concentration increases from 0%to 4%,the transmittance of peakⅠand peakⅡcan reach 0.16 and 0.24,respectively.Because of the obvious change of its transmittance intensity,the hydrogen concentration can be monitored and detected by the intensity change of the transmission peak.The proposed sensor is simple to process.The thin Pd film makes the sensor respond quickly,and the EOT effect makes the signal-to-noise ratio(SNR)of the structure high.The photoelectric integration technology can be used for mass production,which has strong practical value.

关 键 词：氢气传感 表面等离激元(SPs) 折射率传感 钯金(Pd/Au)复合膜 

分 类 号：TN253[电子电信—物理电子学]