K因子在ZAF迭代计算中的作用和强基体效应样品中ZAF修正系数的具体分析  

Role of K factor in ZAF iteration calculation and concrete analysis of ZAF correction coefficient for specimen with strong matrix effect

作　　者：张晓峰 胡晋生 李明 周子浩 乔桥 周广学 ZHANG Xiaofeng;HU Jinsheng;LI Ming;ZHOU Zihao;QIAO Qiao;ZHOU Guangxue(Central Iron and Steel Research Institute Co.,Ltd.,Beijing 100081,China;JEOL(BEIJING)Co.,Ltd.,Beijing 100089,China;Analytical Center,Ningbo Institute of Materials Technology and Engineering,Chinese Academy of Sciences,Ningbo 315201,China;Key Laboratory of Marine Materials and Related Technologies,Zhejiang Key Laboratory of Marine Materials and Protective Technologies,Ningbo Institute of Materials Technology and Engineering,Chinese Academy of Sciences,Ningbo 315201,China)

机构地区：[1]钢铁研究总院有限公司,北京100081 [2]捷欧路(北京)科贸有限公司,北京100089 [3]中国科学院宁波材料技术与工程研究所分析测试中心,浙江宁波315201 [4]中国科学院宁波材料技术与工程研究所,中国科学院海洋新材料与应用技术重点实验室,浙江宁波315201

出　　处：《冶金分析》2024年第4期17-22,共6页Metallurgical Analysis

摘　　要：ZAF法是目前电子探针(EPMA)定量分析时最常用的修正方法,其本质就是准确测量样品中每个元素的K因子,然后进行K因子的数学迭代计算(数学修正)。理解了这一修正过程,有利于操作者正确、精确地设置定量分析实验条件。对于超轻元素含量不低或基体效应强的样品,K因子和实际浓度相差较大,修正系数相应也较大,这种情形下K因子的准确测量尤为重要。本文首先对ZAF法的迭代计算数学过程进行了推导,说明K因子是ZAF定量分析的核心;通过CrTiAlC磁控溅射材料(C质量分数约为8%)的微区定量分析结果,进一步分析造成C、Al元素的K因子和实际浓度相差较大的物理原因并对ZAF修正系数的每一项进行分析,进一步理解ZAF定量的数学迭代过程,建立强基体效应样品系统下的定量分析参数设置思路。At present,ZAF method is the most commonly used correction method for quantitative analysis by electron probe microanalysis(EPMA).The essential of ZAF method is to accurately measure the K factor of each element in the sample,and then the iterative calculation(mathematical correction)of K factors are conducted.The understanding of this correction process is helpful for the correct and accurate setting of experiment conditions in quantitative analysis.For the samples with high content of ultra-light elements or strong matrix effect,the K factors have great difference with the actual concentration.Meanwhile,the correction coefficients are also higher.In this case,the accurate measurement of K factors is especially important.In this paper,the mathematical process of iterative calculation for ZAF method was deducted,indicating that K factor was the core of ZAF quantitative analysis.Based on the quantitative results of micro-region analysis of CrTiAlC magnetron sputtering material(the mass fraction of carbon was about 8%),the physical reason for causing great difference between K factor and actual concentration of C and Al were analyzed,and each item of ZAF correction coefficients were investigated.The mathematical iteration process of ZAF quantitative analysis and the parameter setting for quantitative analysis of sample system with strong matrix effect could be further understood.

关 键 词：电子探针(EPMA) K因子 ZAF迭代计算 ZAF修正系数 磁控溅射材料 质量吸收系数 

分 类 号：TG115.215[金属学及工艺—物理冶金]