H13钢中碳化物及非金属夹杂物扫描电镜自动统计的影响因素探讨  

Study on influencing factors of automatic statistical analysis of carbides and nonmetallic inclusions in H13 steel by scanning electron microscope

作　　者：李云玲 马党参[1] 钟振前 迟宏宵[1] 周健[1] 张淑兰[1] LI Yunling;MA Dangshen;ZHONG Zhenqian;CHI Hongxiao;ZHOU Jian;ZHANG Shulan(Central Iron and Steel Research Institute Co.,Ltd.,Beijing 100081,China;NCS Testing Technology Co.,Ltd.,Beijing 100081,China)

机构地区：[1]钢铁研究总院有限公司,北京100081 [2]钢研纳克检测技术股份有限公司,北京100081

出　　处：《冶金分析》2024年第4期23-30,共8页Metallurgical Analysis

基　　金：钢研纳克自立课题(ZNCS254)。

摘　　要：以H13钢为研究对象,利用扫描电镜(SEM)对钢中碳化物及夹杂物进行自动统计,讨论了放大倍数、图像分辨率、束流大小、工作距离、检测面积、灰度阈值对分析结果的影响,进而确定利用扫描电镜同时测量夹杂物和碳化物的测试方法。研究结果表明,随放大倍数的增大,碳化物数量增加量明显大于夹杂物数量增加量,H13钢中夹杂物及碳化物(1μm以上),放大倍数建议设置在200倍左右。图像分辨率与放大倍数对于最小颗粒尺寸的识别具有一致性,H13钢建议选取512×512以上分辨率。H13钢中碳化物及夹杂物数量密度随束流增大均呈现出先增大后减小的趋势,这与电镜最大束流达到最佳分辨率有关。工作距离对颗粒类型、数量、尺寸影响不大,主要影响能谱计数率。检测面积越大,所用检测时间越长,实际测试中H13钢检测面积应保证在20 mm^(2)以上,才能确保结果的有效性。对H13钢中碳化物及夹杂物测试应采用双阈值设置。The effects of magnification,image resolution,beam size,working distance,detection area and gray threshold on the analysis results of carbides and nonmetallic inclusions in H13 steel by scanning electron microscope(SEM)were discussed.A method for simultaneous measurement of inclusions and carbides by SEM was determined.The results showed that with the increase of magnification,the increase of carbide quantity was obviously greater than that of inclusion quantity.For the inclusions and carbides in H13 steel(above 1μm),the magnification was recommended to be about 200.The image resolution and magnification had consistence for the identification of the smallest particle size.The resolution above 512×512 was recommended for the H13 steel.The quantity density of carbides and inclusions in H13 steel increased first and then decreased with the increase of beam current,which was related to that the optimal resolution of SEM could be obtained under the maximum beam current.The working distance had little influence on the particle type,quantity and size,and it mainly affected the counting of energy spectrum.The larger the detection area was,the longer the detection time was.In the actual test,the detection area of H13 steel should be guaranteed to be more than 20 mm^(2) in order to ensure the effectiveness of the results.Dual threshold setting should be adopted for testing carbides and inclusions in H13 steel.

关 键 词：H13钢 碳化物 夹杂物 扫描电镜(SEM) 自动统计分析 

分 类 号：TF76[冶金工程—钢铁冶金]