开槽砂轮磨削硅棒时的有限元模拟及磨削实验  

Finite Element Simulation and Grinding Experiment of Silicon Rod with Slotted Wheel

作　　者：武聪豪 高伟[1] 姜红飞 单冬冬 Wu Conghao;Gao Wei;Jiang Hongfei;Shan Dongdong(College of Electromechanical Engineering,Qingdao University of Science and Technology,Qingdao,Shandong 266000,China;不详)

机构地区：[1]青岛科技大学机电工程学院,山东省青岛市266000 [2]青岛高测科技股份有限公司

出　　处：《工具技术》2024年第4期122-126,共5页Tool Engineering

摘　　要：端面砂轮磨削硅棒时,砂轮高速旋转并在硅棒表面形成一定压力的空气附面层,阻碍了磨削液进入磨削区参与有效冷却,为此设计了一种在磨料环内侧沿半径方向开设非贯通槽的新型砂轮结构,对该结构下的磨削情况进行有限元模拟,分析气液两相流流场分布,并开展磨削实验,多方面评估开槽砂轮的磨削性能。实验结果表明,开槽砂轮磨削后的硅棒表面粗糙度平均值为0.095μm,比未开槽砂轮约低10%;磨削过程中最大电流平均值为9.5A,降低约21%;修刀间隔平均值为18700mm,提高约38%;开槽砂轮表面清洁且无明显的发黑现象。研究结果表明:开槽砂轮在一定程度上可以削弱气障层,增加磨削区磨削液的体积分布,改善磨削区的清洗和冷却效果,提高砂轮的自锐性和锋利性,从而提高磨削质量和磨削效率。In the process of grinding silicon rod with end wheel,a certain pressure air boundary layer is formed on rotating grinding wheel surface with high speed,which prevents the grinding fluid from entering the grinding zone effectively to participate in cooling.For this purpose,a new grinding wheel structure with a non-through groove along the inner radius of the abrasive ring is designed.The corresponding finite element simulation is carried out to analyze the flow field distribution,and grinding experiments are carried out to evaluate the grinding performance of the slotted wheel from many aspects.The experimental results show that the average surface roughness value of silicon rod after grinding with slotted wheel is 0.095μm,which is about 10%lower than that with unslotted wheel.In the grinding process,the average maximum current value is 9.5A,which is reduced by about 21%.The average repair interval is 18700mm,increased by 38%.The surface of slotted grinding wheel is bright and has no obvious blackening phenomenon.The results show that the slotted grinding wheel can weaken the air barrier layer to some extent,increase the volume distribution of grinding fluid in the grinding area,improve the cleaning and cooling effect in the grinding area,improve the self-sharpness and sharpness of the grinding wheel,and thus improve the grinding quality and grinding efficiency.

关 键 词：开槽砂轮 端面磨削 硅棒 断续磨削 有限元模拟 

分 类 号：TG58[金属学及工艺—金属切削加工及机床] TH162[机械工程—机械制造及自动化]