一种薄膜导热性能测试装置的研制  

Development of a Thermal Conductivity Testing Device for Thin Films

作　　者：方丹 王云祥 黄红平 王震 付晨 FANG Dan;WANG Yunxiang;HUANG Hongping;WANG Zhen;FU Chen

机构地区：[1]苏州市计量测试院

出　　处：《计量与测试技术》2024年第4期28-30,共3页Metrology & Measurement Technique

基　　金：江苏省市场监督管理局科技项目(项目编号:KJ21125085)。

摘　　要：纳米碳材料复合薄膜具有优异的传热换热性能,被视为新一代热管理材料,已在产业中推广应用。准确测量其导热系数是评价薄膜传热性能的重要指标。本文基于3ω法原理,搭建一套薄膜导热性能测试装置,用于测量纳米碳材料复合薄膜导热系数及热扩散率,并使用SiO_(2)薄膜对装置的可靠性进行验证。结果表明:SiO_(2)薄膜导热系数与文献的标准值偏差小于5%,该装置可有效开展薄膜导热系数测量。Nano-carbon composite films have excellent heat and heat transfer properties, and are regarded as a new generation of thermal management materials, which have been widely used in the industry.Accurate measurement of thermal conductivity is an important index to evaluate heat transfer performance.Based on the principle of 3ω method, this paper builds a test device for the thermal conductivity of thin films, which is used to measure the thermal conductivity and thermal diffusivity of nano-carbon composite films, and uses SiO_(2) films to verify the reliability of the device.The results show that the deviation between the thermal conductivity of SiO_(2) film and the standard value in the literature is less than 5%, and the device can effectively measure the thermal conductivity of the film.

关 键 词：纳米碳材料薄膜 热扩散率 导热系数 测试装置 

分 类 号：TB383.2[一般工业技术—材料科学与工程] TH87[机械工程—仪器科学与技术]