亚波长光栅与法布里-珀罗滤光片集成的高性能光谱偏振分光器  

High-performance spectro-polarimetric filter by integrating subwavelength gratings with Fabry-Perot filter

作　　者：朱远宇 关学昱 余沛其 刘清权 贾奇祥 吴杰[1] 李辰璐 李志锋[1] 王少伟[1,3,4] ZHU Yuan-Yu;GUAN Xue-Yu;YU Pei-Qi;LIU Qing-Quan;JIA Qi-Xiang;WU Jie;LI Chen-Lu;LI Zhi-Feng;WANG Shao-Wei(State Key Laboratory of Infrared Physics,Shanghai Institute of Technical Physics,Chinese Academy of Sciences,Shanghai 200083,China;School of Physical Science and Technology,ShanghaiTech University,Shanghai 201210,China;Shanghai Engineering Research Center of Energy-Saving Coatings,Shanghai 200083,China;University of Chinese Academy of Sciences,Beijing 100049,China)

机构地区：[1]中国科学院上海技术物理研究所红外物理国家重点实验室,上海200083 [2]上海科技大学物质学院,上海201210 [3]上海节能镀膜玻璃工程技术研究中心,上海200083 [4]中国科学院大学,北京100049

出　　处：《红外与毫米波学报》2024年第2期179-186,共8页Journal of Infrared and Millimeter Waves

基　　金：the National Key R&D Program of China(2021YFA0715500);the National Natural Science Foundation of China(NSFC)(12227901);the Shanghai Municipal Science and Technology Major Project(2019SHZDZX01);the Chinese Academy of Sciences President’s International Fellowship Initiative(2021PT0007)。

摘　　要：光谱偏振成像技术是一种新型的光学成像技术,它不仅提高了目标的信息获取量,还降低了背景噪声,可以捕获目标细节,检测伪装目标。本文提出了一种将亚波长光栅与F-P滤光片相结合的光谱偏振测量器件,该器件可以获得超高光谱分辨率和偏振消光比,并且光谱和偏振可以灵活调控。本文设计了一种光谱偏振同时分光器,可同时获得4个光谱通道的斯托克斯参数。仿真结果表明,其光谱分辨率为217,偏振消光比为106。实验结果表明,亚波长光栅的偏振消光比大于500,透射率为90%。全介质F-P滤光片的光谱分辨率为30,在长波红外波段的透射率为60%。该设计方法具有通用性,可用于可见光、红外甚至太赫兹等波段。得益于这些优点,器件在微型偏振光谱仪和全斯托克斯偏振检测等领域有很大的应用潜力。Spectral polarization imaging technology is a novel optical imaging technique that not only enhances the amount of information acquired from targets,but also reduces background noise,which can capture target de⁃tails and detect disguised targets.This paper presents a spectro-polarimetric device by integrating subwavelength gratings with Fabry-Perot(F-P)filter,which can obtain ultra-high spectral resolution and polarization extinction ratio with high control flexibly on both spectrum and polarization.A spectro-polarimetric filter(SPF)has been designed to obtain 4 spectral channels of stokes parameters simultaneously.Simulation results show that it has a spectral resolution(SR,λ/Δλ)of 217 and a polarization extinction ratio(PER)of 106.The polarization extinc⁃tion ratio of subwavelength grating is measured to be over 500 PER with 90%transmission efficiency.The spec⁃tral resolution of all-dielectric F-P filter is measured to be 30 with 60%transmission efficiency in the long wave in⁃frared band.The designed method is universal and can be used in a wide range of wavelength bands such as visi⁃ble,infrared,and even terahertz.It has great potential applications in fields such as micro-polarization spectrome⁃ters and full-stokes polarization detection,benefiting from these advantages.

关 键 词：光谱偏振分光器 亚波长光栅 法布里-珀罗滤光片 光谱 偏振 

分 类 号：O43[机械工程—光学工程]