EAST装置上差分抽气测量系统的设计  

Design of Differential Extraction Measurement System on EAST

作　　者：潘浩 黄明 赵胜波 庄会东[1] 余耀伟 左桂忠 胡建生[1] PAN Hao;HUANG Ming;ZHAO Shengbo;ZHUANG Huidong;YU Yaowei;ZUO Guizhong;HU Jiansheng(Institute of Plasma Physics,Hefei Institutes of Physical Science,Chinese Academy of Sciences,Hefei 230031,China;University of Science and Technology of China,Hefei 230026,China)

机构地区：[1]中国科学院合肥物质科学研究院等离子体物理研究所,合肥230031 [2]中国科学技术大学,合肥230026

出　　处：《真空与低温》2024年第3期238-242,共5页Vacuum and Cryogenics

基　　金：国家重点研发计划项目(2022YFE03130000,2022YFE03100003);中国科学院合肥大科学中心高端用户培育基金(2021HSC-UE013)。

摘　　要：在托卡马克装置运行过程中,装置内壁吸附的杂质粒子会释放到内真空室,影响等离子体的平稳运行。因此需要在放电前对装置进行壁处理清洗。设计了差分抽气测量系统,可以在保持内真空室气体比例不变的前提下降低压力,实现四极质谱仪的正常工作,检测壁处理清洗期间的气体成分。整个设计过程围绕关键部件小流导法兰的流导设计展开,采用粒子平衡法计算得出小流导法兰的设计参数。可以在分子流流态下将待测腔室的气压从10 Pa降低至约0.01 Pa。设计结果为类似高压力条件下气体成分监测设备的设计提供参考。During the operation of the Tokamak device,impurity particles adsorbed on the first wall are released into the inner vacuum chamber,affecting the smooth operation of the plasma.Therefore,it is necessary to perform wall treatment on the device before discharge.A differential extraction measurement system is designed that can reduce gas pressure while maintaining the same proportion of gas in the inner vacuum chamber,achieve the normal operation of a quadrupole mass spectrometer,and monitor gas composition during wall treatment.The entire design process is carried out around the conductance design of the key component a small conductance flange,and the gas balance method is used to calculate the design parameters of the small conductance flange.It is possible to reduce the pressure of the test chamber from 10 Pa to about 0.01 Pa in the molecular flow state.The results provide reference for the design of gas composition monitoring equipment under similar high-pressure conditions.

关 键 词：壁处理 残气分析 EAST 

分 类 号：TB771[一般工业技术—真空技术]