不同冷却剂对感性耦合等离子体性能的影响  

Effects of Different Coolants on the Properties of Sensitively Coupled Plasma

作　　者：陶鑫 梁立振 王宾[1] 钱玉忠[2] 吴亮亮 肖金龙 孟献才 胡纯栋 TAO Xin;LIANG Lizhen;WANG Bin;QIAN Yuzhong;WU Liangliang;XIAO Jinlong;MENG Xiancai;HU Chundong(School of Electrical and Information Engineering,Anhui University of Science and Technology,Huainan 232001,Anhui,China;Anhui Energy Laboratory,Energy Research Institute of Hefei Comprehensive National Science Center,Hefei 230031,China;Institute of Plasma Physics,Hefei Institutes of Physical Science,Chinese Academy of Sciences,Hefei 230031,China)

机构地区：[1]安徽理工大学电气与信息工程学院,安徽淮南232001 [2]合肥综合性国家科学中心能源研究院安徽省能源实验室,合肥230031 [3]中国科学院合肥物质科学研究院等离子体物理研究所,合肥230031

出　　处：《真空与低温》2024年第3期343-348,共6页Vacuum and Cryogenics

基　　金：国家自然科学基金(12105135);安徽省协同创新计划(GXXT-2021-015、GXXT-2022-005);安徽省自然科学基金(2308085MA22);合肥综合性国家科学中心能源研究院(安徽省能源实验室)项目(21KZS202、21KZS208)。

摘　　要：感性耦合等离子体(ICP)源作为聚变中性束注入(NBI)加热系统的关键部件,其工作过程中会产生大量的热量,不仅会影响装置真空,还会导致等离子体阻抗发生变化,进而对射频功率馈入产生一定的影响,因此有必要对放电腔体进行冷却。设计了双层玻璃筒放电腔体以实现对放电腔体的主动冷却,并定量研究了不同冷却剂(去离子水、纯净水、氟化液等)情况下对ICP放电的影响。实验结果表明,在双层玻璃筒中间层主动通入冷却剂能够有效避免等离子体热负荷对放电腔体真空度的影响。采用氟化液作为冷却剂时,等离子体阻抗值最低,对等离子体电子密度提升最大,较采用去离子水和纯净水最大高出约15.3%和18%。通过比较冷却剂的体积电阻率和相对介电常数发现,冷却剂的相对介电常数与等离子体电子密度和等效阻抗的变化呈现出负相关性,即在放电腔体温度不变情况下,相对介电常数越低等效阻抗也越低,等离子体密度也越高。实验结果对于感性耦合等离子体放电腔体的设计及冷却剂的选择具有指导意义。The Inductive Coupled Plasma(ICP)source,a crucial component of the fusion Neutral Beam Injection(NBI)heating system,generates significant heat during operation.This heat not only affects the vacuum of the device but also alters the plasma impedance,thereby impacting the RF power feed.A double-layer glass cylinder discharge chamber is designed to actively cool the discharge chamber.The effects of different coolants(deionized water,purified water,fluorinated liquid,etc)on ICP discharge are quantitatively studied.The experimental results demonstrate that actively injecting coolant into the double-layer glass cylinder could effectively mitigate the influence of the plasma heat load on the vacuum chamber.Moreover,when fluorinated liquid is used as a coolant,the plasma impedance value is minimized,resulting in the highest increase in plasma electron density,approximately 15.3%and 18%higher than that of deionized water and pure water,respectively.By comparing the volume resistivity and relative dielectric constant of the coolants,it can be concluded that the relative dielectric constant is inversely correlated with changes in plasma electron density and equivalent impedance.In other words,lower relative dielectric constants correspond to lower equivalent impedance and higher plasma density.The experimental results provide valuable guidance for the design of sense-coupled plasma discharge cavities and the selection of coolants.

关 键 词：感性耦合等离子体 冷却剂 氟化液 阻抗特性 相对介电常数 

分 类 号：TB69[一般工业技术—制冷工程]