窄线宽外腔半导体激光器研究进展  

Research progress of narrow-linewidth external cavity diode lasers

作　　者：秦晓敏 史田田 王志洋 史航博 陈景标[1,3] Qin Xiaomin;Shi Tiantian;Wang Zhiyang;Shi Hangbo;Chen Jingbiao(State Key Laboratory of Advanced Optical Communication Systems and Networks,Institute of Quantum Electronics,School of Electronics,Peking University,Beijing 100871,China;National Key Laboratory of Science and Technology on Micro/Nano Fabrication,School of Integrated Circuits,Peking University,Beijing 100871,China;Hefei National Laboratory,Hefei 230088,China)

机构地区：[1]北京大学电子学院区域光纤通信网与新型光通信系统国家重点实验室量子电子学研究所,北京100871 [2]北京大学集成电路学院微米/纳米加工技术国家级重点实验室,北京100871 [3]合肥国家实验室,合肥230088

出　　处：《仪器仪表学报》2024年第2期63-78,共16页Chinese Journal of Scientific Instrument

基　　金：科技创新2030―“量子通信与量子计算机”重大项目(2021ZD0303200);中国博士后科学基金项目(BX2021020);温州市重大科技创新重点项目(ZG2020046)资助。

摘　　要：窄线宽外腔半导体激光器具有结构简单、可调谐、噪声低等优势,广泛应用于量子精密测量、光通信、激光雷达等领域。根据外腔选频器件的不同,本文主要介绍光栅型激光器、干涉滤光型激光器、波导型激光器和法拉第激光器四类外腔半导体激光器,分析各类激光器的基本结构与选频机制、介绍各自的优缺点以及国内外研究进展。其中,前三类激光器采用非量子器件进行频率选择,而法拉第激光器利用共振法拉第旋光效应选频,输出波长直接对应原子跃迁谱线,对激光二极管的电流与温度变化具有良好的鲁棒性。随后介绍外腔半导体激光器的应用情况,尤其是在精密测量领域中的典型应用。最后总结并展望窄线宽外腔半导体激光器的未来发展方向。Narrow-linewidth external cavity diode lasers(ECDLs)have the advantages of compact structure,tunable wavelength,and low noise.They are widely used in quantum precision measurement,optical communication,laser radar,and other fields.In this article,four types of narrow linewidth ECDL using different frequency selection devices are introduced,including grating-ECDL,interference filtering ECDL,waveguide-ECDL,and Faraday laser.The article presents the basic structure and frequency selection mechanism,advantages and disadvantages of the ECDLs,as well as their international research progress.The first three types of ECDLs use non-quantum devices for frequency selection,while Faraday lasers utilize the resonant Faraday optical rotation effect for frequency selection.Therefore,the output wavelength corresponds to the atomic transition line directly and has good robustness against the fluctuations of the diode temperature and current as well.Then,the applications of these ECDLs are introduced,especially their typical applications in precision measurement.Finally,the future development of narrow linewidth ECDL is summarized and prospected.

关 键 词：外腔半导体激光器 法拉第激光器 窄线宽 精密测量 外腔选频器件。 

分 类 号：TH714[机械工程—测试计量技术及仪器]