基于聚酰亚胺的柔性湿度传感器制备及研究  

Preparation and Research of Flexible Humidity Sensor Based on Polyimide

作　　者：张海力 谢光忠[3] 刘太君 代静 ZHANG Haili;XIE Guangzhong;LIU Taijun;DAI Jing(Faculty of Electrical Engineering and Computer Science,Ningbo University;Institute of IOT Application Technology,Zhejiang Fashion Institute of Technology;School of Optoelectronic Science and Engineering,University of ElectronicScience and Technology of China)

机构地区：[1]宁波大学信息科学与工程学院 [2]浙江纺织服装职业技术学院物联网应用技术研究院 [3]电子科技大学光电科学与工程学院

出　　处：《仪表技术与传感器》2024年第4期11-18,47,共9页Instrument Technique and Sensor

摘　　要：文中以聚酰胺酸(PAA)为前驱体,通过热处理工艺可得聚酰亚胺(PI)薄膜,添加氧化石墨烯(GO)合成PI/GO复合薄膜及后续电极制备得到基于聚酰亚胺的平行板电容式柔性湿度传感器。在此基础上深入研究了叉指电极式和平行板式构型、PAA旋涂转速、PAA酰亚胺化温度、GO喷涂量对湿度传感器性能的影响,最终得到的湿度传感器具有良好重复性、快速的响应恢复时间,最大湿滞仅为3.8%RH,且具有优异的柔性性能,在可穿戴柔性电子器件领域具有广泛的应用前景。In this study,polyamide acid(PAA)was used as the precursor,polyimide(PI)films can be obtained by heat treatment processes,and then graphene oxide(GO)was added to synthesize PI/GO composite film to obtain a polyimide-based parallel plate capacitive flexible humidity sensor.On this basis,the effects of interdigital electrode and parallel plate configuration,PAA spinning speed,PAA imide temperature and GO spray amount on the performance of the humidity sensor were deeply studied,and the final humidity sensor has good repeatability,fast response and recovery time,maximum hysteresis of 3.8%RH,and excellent flexible performance,which has a wide application prospect in the field of wearable flexible electronic devices.

关 键 词：柔性 湿度传感器 聚酰亚胺(PI) 氧化石墨烯(GO) PI/GO复合薄膜 平行板电容结构 湿敏特性 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]