氧化石墨烯薄膜电阻式湿度传感器研究  

Research on Graphene Oxide Thin Film Resistive Humidity Sensor

作　　者：孟德帅 曹阳 李镇全 胡冰娇 尚钰斐 虞晟 胡场翔 MENG Deshuai;CAO Yang;LI Zhenquan;HU Bingjiao;SHANG Yufei;YU Sheng;HU Changxiang(School of Instrumentation Science and Opto-electronics Engineering,Beijing Information Science&Technology University)

机构地区：[1]北京信息科技大学仪器科学与光电工程学院

出　　处：《仪表技术与传感器》2024年第4期19-23,37,共6页Instrument Technique and Sensor

基　　金：北京市自然科学基金面上项目(4192024);北京信息科技大学2023年大学生创新创业训练计划项目(C2023696)。

摘　　要：为研制一种高灵敏、快响应的湿度传感器,选用单层氧化石墨烯分散液为原料,将其滴涂于μm级宽度的电极沟道上,自然干燥成膜后,制得了基于氧化石墨烯薄膜的电阻式湿度传感器。研究了单层氧化石墨烯分散液浓度、电极沟道宽度这2个关键参数对传感器性能的影响规律并得出最优参数。最优传感器的响应时间和恢复时间都达到0.3 s左右,灵敏度最高达399%,相对湿度检测范围为5%~90%。使用最优传感器演示了对人体呼吸的监测和对人体手指的非接触式响应。In order to develop a high sensitivity and fast response humidity sensor,a single-layer graphene oxide dispersion liquid was selected as the raw material,which was drip-coated on a micro-sized channel and then was naturally dried to form a graphene oxide film,and a resistive humidity sensor based on graphene oxide film was prepared.The influence of the concentration of the dispersion liquid and the width of the channel on the performance of the sensor was studied and the optimal parameters were obtained.The response time and the recovery time of optimal sensor is about 0.3 seconds,the sensitivity is up to 399%,and relative humidity detection range is 5%~90%.Monitoring of human breath and non-contact response to human fingers were demonstrated using optimal sensors.

关 键 词：氧化石墨烯 高灵敏 快响应 湿度传感器 

分 类 号：TP212.1[自动化与计算机技术—检测技术与自动化装置]