Characterizations of the electrothermal parameters of a transition edge sensor microcalorimeter and its energy resolution  

作　　者：Yue Zhao Hubing Wang Bo Gao Zhen Wang 

机构地区：[1]State Key Laboratory of Functional Materials for Informatics,Shanghai Institute of Microsystem and Information Technology,Chinese Academy of Sciences,Shanghai 200050,China [2]CAS Center for Excellence in Superconducting Electronics(CENSE),Shanghai 200050,China [3]University of Chinese Academy of Sciences,Beijing 100049,China

出　　处：《Superconductivity》2023年第3期1-7,共7页超导（英文）

基　　金：supported by China National Space Administration(CNSA)under grant No.D050104;the grant for low energy gamma-ray detection research based on SQUID technique;supported by the Superconducting Electronics Facility(SELF)of Shanghai Institute of Microsystem and Information Technology,Chinese Academy of Sciences.

摘　　要：We developed a transition‐edge sensor microcalorimeter(μ‐calorimeter)using Mo/Au/Au thin films.We report the detector fabrication,the measurements of the electrothermal parameters and the noise characterizations of the transition‐edge sensor μ‐calorimeters.We estimated the energy resolution of theμ‐calorimeter using the measured noise spectrum and the calculated power‐to‐current responsivity.Using a ^(55)Fe radioactive X‐ray source,we characterized the detector responses to incident photons at various working points.The best instrumental energy resolution achieved was 4.13 eV@5.9 keV,which agrees qualitatively with the resolution of 4.01 eV estimated from the noise spectrum.

关 键 词：Transition edge sensor MICROCALORIMETER Energy resolution X‐ray 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]