光栅MOEMS加速度计温度特性  

Temperature Characteristics of Grating MOEMS Accelerometer

作　　者：邰鹏 金丽 解琨阳[2,3] 张敏娟 李孟委 Tai Peng;Jin Li;Xie Kunyang;Zhang Minjuan;Li Mengwei(School of Instrumentation and Electronics,North University of China,Taiyuan 030051,China;Academy for Advanced Interdisciplinary Research,North University of China,Taiyuan 030051,China;School of Innovation and Entrepreneurship,North University of China,Taiyuan 030051,China;School of Information and Communication Engineering,North University of China,Taiyuan 030051,China)

机构地区：[1]中北大学仪器与电子学院,太原030051 [2]中北大学前沿交叉科学研究院,太原030051 [3]中北大学创新与创业学院,太原030051 [4]中北大学信息与通信工程学院,太原030051

出　　处：《微纳电子技术》2024年第5期127-133,共7页Micronanoelectronic Technology

摘　　要：由于硅微机械加速度计受温度影响,导致硅弹性模量和热膨胀系数发生变化,造成微光机电系统(MOEMS)加速度计标度因数漂移、测量稳定性下降等问题。首先,采用COMSOL软件对光栅MOEMS加速度计微机械结构部分进行了温度特性仿真,分析了硅弹性模量温度系数和热膨胀系数对光栅MOEMS加速度计微机械结构标度因数和零位的影响。其次,设计了温控精度达0.1℃的温度控制系统,并利用该系统对加速度计进行温度控制。最后,对光栅泰伯效应MOEMS加速度计温度特性展开测试,结果表明,加速度计的标度因数随温度升高而增大,零偏稳定性随温度的升高而降低,加速度计标度因数温度系数为0.30 V·g^(-1)·℃^(-1),零偏稳定性温度系数为-7.78μg/℃,其变化趋势与仿真结果一致。这为实现全温范围下高精度MOEMS加速度计奠定了基础。Due to the influence of temperature on silicon micromechanical accelerometers,the elastic modulus and thermal expansion coefficient of silicon change,resulting in the problems such as scale factor drift and measurement stability decline of micro-opto-electro-mechanical system(MOEMS)accelerometers.Firstly,the temperature characteristics of the micro-mechanical structure of the grating MOEMS accelerometer were simulated by COMSOL software,and the effects of temperature coefficient of the silicon elastic modulus and thermal expansion coefficient on the scale factor and zero position of micro-mechanical structure for the grating MOEMS accelerometer were analyzed.Secondly,a temperature control system with temperature control accuracy of 0.1℃was designed and used to control the temperature of the accelerometer.Finally,the temperature characteristics of the MOEMS accelerometer with grating Talbot effect were tested.The results show that the scale factor of the accelerometer increases while zero position decreases with the increase of temperature.The temperature coefficient of the accelerometer scale factor is 0.30 V·g^(-1)·℃^(-1),and the temperature coefficient of zero-bias stability is-7.78μg/℃,which is consistent with the simulation results.This lays a foundation for the realization of high-precision MOEMS accelerometers in the full temperature range.

关 键 词：微光机电系统(MOEMS)加速度计 光栅泰伯效应 热仿真 温度特性 温控电路 标度因数 零偏稳定性 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]