宽角度位相调控反射镜的设计与研制  

Design and fabrication of wide angle phase control mirror

作　　者：李大琪[1,2] 刘保剑 余德明 段微波[1,2,4] 刘定权 Li Daqi;Liu Baojian;Yu Deming;Duan Weibo;Liu Dingquan(Optical Thin Film and Materials Research Laboratory,Shanghai Institute of Technical Physics,Chinese Academy of Sciences,Shanghai 200083,China;Shanghai Key Laboratory of Optical Coatings and Spectral Modulation,Shanghai 200083,China;Department of Optical Science and Engineering,School of Information Science and Engineering,Fudan University,Shanghai 200433,China;College of Mechanical Engineering,Chongqing University of Technology,Chongqing 400054,China)

机构地区：[1]中国科学院上海技术物理研究所光学薄膜与材料研究室,上海200083 [2]上海市光学薄膜与光谱调控重点实验室,上海200083 [3]复旦大学信息科学与工程学院光科学与工程系,上海200433 [4]重庆理工大学机械工程学院,重庆400054

出　　处：《红外与激光工程》2024年第4期215-222,共8页Infrared and Laser Engineering

基　　金：国家重点研发计划项目(2021YFB3701500);中国科学院青年创新促进会项目(2023248)。

摘　　要：宽角度位相调控反射镜是下一代中高轨量子通信系统中的核心元件,用于宽角度范围内信号光的高效传递与偏振态的精确调控。基于等效多层膜理论,采用介质反射膜堆加非规整位相调控膜的膜系结构,设计了一种宽角度位相调控反射镜。选择Nb2O5和SiO2分别作为高、低折射率薄膜材料,通过误差分析,优化沉积工艺,采用电子束蒸发结合离子辅助沉积的方式,在德国莱宝Lab900-plus设备上制备出该薄膜元件。研制结果表明,反射镜在780 nm处、45°±7.5°入射范围内,其反射率大于99.3%,位相差控制在3°以内,满足量子通信系统的反射率及位相差控制要求,且通过相关环境模拟实验,满足可靠性要求,为该类偏振调控薄膜元件在下一代中高轨量子卫星中的工程应用打下了坚实的基础。Objective In quantum communication,such as quantum key distribution,quantum entanglement,and quantum teleportation,photons are controlled to a specific polarized direction for transmission and decoding.There is a need to establish an effective and stable link of quantum channels between the transmitter and receiver to maintain max channel efficiency and reduce quantum bit error rate.Therefore,it is necessary to do phase control on the thin film optical components in the optical system.In published literatures,most phase control mirrors are designed with a single incidence angle(such as 10°,22.5°,35°and 45°),which cannot meet the requirement of optical-mechanics system used in new generation of quantum communication working at medium to high orbit any longer.This research developed a dielectric reflector with high reflectivity and wide angle range for efficient energy transfer and precise phase control,which has wide application prospects for this type of thin film component in next generation of quantum communication systems working at medium to high orbit.Methods The design method is as below.Two materials with different refractive index are selected,the values of which are referred as H and L respectively.(HL)^n is used as the basic film system mechanism,and the design value of wavelength is determined based on the signal channel at the center of the cutoff band.Multiple layers equivalent to d1L d2H d3L or d1H d2L d3H for phase control are applied on the surface layer of the film base structure.The initial film structure is:G|(HL)^14 d1H d2L d3H d4L d5H d6L d7H d8L|Air,where G is the substrate,d1-d8 are the thickness coefficients of each film layer respectively.Optimal goals are set based on task indicators,and optimization algorithms are used such as Global Modified LM or Global Simplex for optimal iterations to change film thickness to obtain the best design result.The preparation of this product was completed on Lab900-plus vacuum deposition machine produced by Leybold Company in Germany.The equipment is

关 键 词：光学薄膜 位相调控 反射镜 偏振 宽角度 

分 类 号：O484.4[理学—固体物理]