Nb掺杂对VN薄膜组织、力学及摩擦学行为的影响  

Influence of Nb Doping on Structural,Mechanical and Tribological Properties of VN Film

作　　者：蒋成燕 贾金龙 冯毅 郭小汝 刘万佳 JIANG Chengyan;JIA Jinlong;FENG Yi;GUO Xiaoru;LIU Wanjia(Department of Materials Engineering,Lanzhou Institute of Technology,Lanzhou 730050,China)

机构地区：[1]兰州工业学院材料工程学院,甘肃兰州730050

出　　处：《材料保护》2024年第5期68-75,171,共9页Materials Protection

基　　金：甘肃省高等学校创新基金项目[2021A-160]资助。

摘　　要：为理解Nb元素的纳米复合掺杂对VN薄膜的结构、力学和摩擦学性能的影响,利用反应磁控溅射方法制备氮化钒(VN)和氮化钒铌(VNbN)薄膜,借助场发射扫描电镜(FESEM)、原子力显微镜(AFM)、能谱仪(EDS)、X射线衍射仪(XRD)、显微硬度计、纳米压痕仪、摩擦试验机、光学显微镜和台阶仪等仪器对2种薄膜的微观结构、力学行为以及摩擦学行为进行了对比分析。结果表明:原子分数10.37%的Nb元素的掺杂,使得VNbN薄膜柱状晶结构的致密度更高,且表面粗糙度下降了45.26%。纳米压入结果显示,VNbN薄膜的硬度为20.47 GPa,比VN薄膜的硬度增加了7.51%,H/E和H^(3)/E^(2)值也比VN薄膜的分别高18.64%和49.25%。摩擦学分析表明,Nb的加入使得VNbN薄膜的常温摩擦学性能显著改善,其摩擦系数低至0.35,磨损率低至3.30×10^(-6)mm^(3)/(N·m);400℃及600℃高温下VNbN薄膜的摩擦系数低至0.58,同样低于VN薄膜的。但其高温时的耐磨性明显下降,这是由于Nb元素的加入并未改善VN薄膜的高温抗氧化性,高温下VNbN薄膜的硬度相比于VN退化得更快,摩擦时承载力更低,薄膜更易脱落所致。For understanding the influence of Nb element nanocomposite doping on the structure,mechanical and tribological properties of VN films,vanadium nitride(VN)and vanadium niobium nitride(VNbN)films were prepared using reactive magnetron sputtering method,and the microstructure,mechanical behavior and tribological behavior of the two films were compared and analyzed by field emission scanning electron microscopy(FESEM),atomic force microscope(AFM),EDS,XRD,microhardness tester,nanoindenter,friction testing machine,optical microscope and step profiler.Result showed that the doping of Nb element with an atomic fraction of 10.3%led to a higher density of the columnar crystal structure of VNbN thin films,and the surface roughness declined by 45.26%.The nanoindentation results indicated that the hardness of VNbN film was 20.47 GPa,which was 7.51%higher than that of VN film,and the H/E and H^(3)/E^(2) values were also 18.64%and 49.25%higher than those of VN film,respectively.Tribological analysis revealed that the addition of Nb significantly improved the tribological properties of VNbN thin films at normal atmospheric temperature,with a friction coefficient as low as 0.35 and a wear rate as low as 3.30×10^(-6)mm^(3)/(N·m).Moreover,the friction coefficient of VNbN film at high temperatures of 400℃and 600℃was as low as 0.58,which was also lower than that of VN films.However,its wear resistance significantly decreased at high temperatures,which was due to that the addition of Nb did not improve the oxidation resistance of VN film at high temperatures,the hardness of VNbN thin films deteriorated faster compared to VN film at high temperatures,the load bearing capacity during the rubbing was lower,and the film was easier to fall off.

关 键 词：VNbN薄膜 微观组织 力学行为 摩擦学行为 

分 类 号：TH117.1[机械工程—机械设计及理论]