高重频飞秒激光高效加工太赫兹滤波器核心结构  

Core structure of terahertz filter fabricated by femtosecond laser with high repetition rate

作　　者：何煦[1] 杨昊 马云灿 李军[1] 蒋均[2,3] 孟立民[1] 叶雁[1] HE Xu;YANG Hao;MA Yuncan;LI Jun;JIANG Jun;MENG Limin;YE Yan(Institute of Fluid Physics,China Academy of Engineering Physics,Mianyang 621900,China;Institute of Electronic Engineering,China Academy of Engineering Physics,Mianyang 621900,China;Microsystem and Terahertz Research Center,China Academy of Engineering Physics,Chengdu 610200,China)

机构地区：[1]中国工程物理研究院流体物理研究所,四川绵阳621900 [2]中国工程物理研究院电子工程研究所,四川绵阳621900 [3]中国工程物理研究院微系统与太赫兹中心,四川成都610299

出　　处：《应用光学》2024年第3期514-521,共8页Journal of Applied Optics

基　　金：中国工程物理研究院流体物理研究所横向项目(20-163-02-ZT-004-005-01);冲击波物理与爆轰物理重点实验室基金(2021JCJQLB05707)。

摘　　要：高频太赫兹滤波器的核心结构具备跨尺度、大去除量、高精度等特点,为实现核心结构高效精密加工,加工技术的选择尤为重要。与常见的机械加工、光刻工艺、MEMS等技术相比,飞秒激光加工技术具有材料普适性强、流程简单、可实现薄壁结构精密加工等优点。以中心频率850 GHz的太赫兹滤波器核心结构设计为输入,利用飞秒激光加工技术开展太赫兹滤波器核心结构的加工实验研究。考虑到低重频飞秒激光不满足高效加工的实际要求,选择高重频飞秒激光作为加工光源,在加工策略精准设计和加工参数精准优化的条件下,实现了高频太赫兹滤波器核心结构的高效精密加工。研究结果表明,高重频飞秒激光加工的太赫兹滤波器,其中心频率测试值与设计值接近。因此,高重频飞秒激光加工技术成为太赫兹滤波器核心结构加工的可选手段。The core structure of high-frequency terahertz(THz)filter has the characteristics of cross-scale,large removal and high precision.In order to realize efficient and precise machining of core structure,the choice of machining technology is particularly important.Compared with common machining,lithography and MEMS technology,the femtosecond laser machining technology has the advantages of strong universality of materials,simple machining flow and precision machining of thin-walled structures.The core structure of THz filter with center frequency of 850 GHz was designed as input,and the machining experiment of the core structure of THz filter was carried out by femtosecond laser machining technology.Considering that the femtosecond laser with low repetition rate could not meet the actual requirements of high-efficiency machining,the high-repetition-rate femtosecond laser was selected as the machining light source,and the high-efficiency and precise machining of the core structure of high-frequency THz filter was realized under the conditions of precise design of machining strategy and precise optimization of machining parameters.The results show that the measured center frequency of the THz filter fabricated by high-repetition-rate femtosecond laser is close to the designed value.Therefore,the high-repetition-rate femtosecond laser processing technology can be used as a flexible stage in the processing of the core structure of THz filter.

关 键 词：太赫兹滤波器 核心结构 飞秒激光 精密加工 加工策略 

分 类 号：TN206[电子电信—物理电子学]