基于量热法的高功率激光功率测试技术  

Power measurement technology of high power laser based on calorimetric method

作　　者：付永杰 于东钰[2] FU Yongjie;YU Dongyu(Institute of Metrology and Testing,Unit 92493 of PLA,Huludao 125000,China;Xi'an Institute of Applied Optics,Xi'an 710065,China)

机构地区：[1]92493部队计量测试研究所,辽宁葫芦岛125000 [2]西安应用光学研究所,陕西西安710065

出　　处：《应用光学》2024年第3期522-528,共7页Journal of Applied Optics

基　　金：国家重点研发计划(“大功率激光精密加工装备计量技术研究”2022YFF0606002)。

摘　　要：针对高功率激光功率的测试,尤其是高功率激光器烤机时的长时间测量需求,设计了基于水冷却的激光功率测量方法。利用热敏电阻测量冷却水进水口和出水口的温差计算激光功率。利用有限元仿真软件建立了吸收腔热路结构的三维有限元模型,并对不同口径的冷却水路进行模拟仿真。测试结果表明,用该方法测试高功率激光功率,测量相对误差可以保证在1.6%以内。Aiming at the power measurement of high power laser,especially the long-time measurement requirements of high power laser,a laser power measurement method based on water cooling was designed.The laser power was calculated by measuring the temperature differences between the cooling water inlet and the outlet with the thermistor.The three-dimensional finite element model of the heat path structure of the absorption cavity was established by using the finite element simulation software,and the cooling water paths of different calibers were simulated.The test results show that testing the power of high power laser with this method,the measurement relative error can be guaranteed to be within 1.6%.

关 键 词：光学计量 高功率激光 量热法 长时间测量 

分 类 号：TN249[电子电信—物理电子学]