高能激光光束质量β因子测量方法  

Measurement method of beam quality factorβfor high energy laser

作　　者：阴万宏[1] 董再天 张云龙[1] 王文涛 刘磊 陈豪远 段园园[1] 吴磊[1] 黎高平[1] 于东钰[1] 吴沛[1] 俞兵[1] 孙鹏程[1] YIN Wanhong;DONG Zaitian;ZHANG Yunlong;WANG Wentao;LIU Lei;CHEN Haoyuan;DUAN Yuanyuan;WU Lei;LI Gaoping;YU Dongyu;WU Pei;YU Bing;SUN Pengcheng(Primary Optical Metrology Station of National Defense Science and Technology Industry,Xi'an Institute of Applied Optics,Xi'an 710065,China;Key Laboratory of Solid-State Laser Technology,The 11th Research Institute of China Electronics Technology Group Corporation,Beijing 100020,China)

机构地区：[1]西安应用光学研究所、国防科技工业光学一级计量站,陕西西安710065 [2]中国电子科技集团公司第十一研究所、固体激光技术重点实验室,北京100020

出　　处：《应用光学》2024年第3期537-542,共6页Journal of Applied Optics

基　　金：国防计量技术基础科研项目(JSJL2020208A003);国防重点预先研究项目(JZX7Y20221183000007)。

摘　　要：高能激光光束质量β因子测量装置主要用于强激光系统状态调试和综合性能参数诊断,用于评价激光系统出光性能以及远场光斑可聚焦的能力。针对接近衍射极限光束质量β因子测量过程中被测光斑在面阵相机上所占的像素点太少等缺陷,研究了采用聚焦显微放大与高精度扫描狭缝相结合的光束质量β因子测量方法,并对相关方案进行了分析计算。此外还设计了采用固定像差元件及平行光管光源组合的激光光束质量β因子测量结果验证方案,对研制的高能激光光束质量β因子测量装置进行了不确定度分析,测量不确定度优于10%。The measurement system of high energy laser beam quality factorβis mainly used for state debugging and comprehensive performance parameters diagnosis of laser system,while these parameters can evaluate the laser output performance and the far-field spot focusing ability of the laser system.Aiming at the defect that the beam quality factorβclose to the diffraction limit occupying too few pixels in the area array detectors,a measurement method was proposed based on microscopic magnification with high-precision scanning slit,and the relevant scheme was analyzed and calculated.In addition,a verification scheme of measurement results using the combination of fixed aberration elements and collimator light sources was designed to analyze the uncertainty of measuring device of developed high energy laser beam quality factorβ,and the measurement uncertainty was better than 10%.

关 键 词：高能激光 β因子 测量方法 显微放大 扫描狭缝 

分 类 号：TN247[电子电信—物理电子学]