分段式的大功率远程等离子体源系统设计  

Design of Segmented High Power Remote Plasma Source System

作　　者：薛家祥[1] 马财钰 王一统 金礼 XUE Jiaxiang;MA Caiyu;WANG Yitong;JIN Li(School of Mechanical and Automobile Engineering,South China University of Technology,Guangzhou 510640,China;School of Physics and Mechatronics Engineering,Guizhou Minzu University,Guiyang 550000,China)

机构地区：[1]华南理工大学机械与汽车工程学院,广州510640 [2]贵州民族大学物理与机电工程学院,贵阳550000

出　　处：《自动化与仪表》2024年第5期30-33,72,共5页Automation & Instrumentation

基　　金：国家自然科学基金资助项目(51875213);广东省自然科学基金项目(2214050007061);贵州省省级科技计划项目(ZK[2022]198);贵州省高等学校教学内容和课程体系改革项目(2021083)。

摘　　要：目前远程等离子体源系统普遍存在输出功率低、系统负载适应范围窄和生成等离子体浓度不稳定等问题,该文基于对TCP型腔体的放电模式和负载特性分析,提出一种分段式的大功率远程等离子体源系统,改进的功率电路提高了电源输出功率,分离的点火回路简化了电路设计并提高自由度,分段的控制策略极大程度的提高了系统负载适应范围,可电离多种气体和更宽范围气体流量。通过实际样机测试,验证了此系统方案设计的可行性,为等离子体电源设计提供了参考价值。Existing remote plasma source systems generally have problems such as low output power,narrow system load adaptation range and unstable plasma concentration.Based on the analysis of discharge mode and load characteristics of TCP cavity,this paper proposes a segmented high-power remote plasma source system.The improved power circuit improves the output power of the power supply.The separated ignition circuit simplifies the circuit design and improves the degree of freedom,and the segmented control strategy greatly improves the system load adaptation range,which can ionize a variety of gases and a wider range of gas flow.The feasibility of the system design is verified by the actual prototype test,which provides a reference value for the design of plasma power supply.

关 键 词：远程等离子体源 电感耦合 TCP 控制策略 

分 类 号：TN86[电子电信—信息与通信工程]