基于镓基液态金属的电容式柔性压力传感器  

Flexible capacitive pressure sensor based on gallium based liquid metal

作　　者：金皓 张宇[1] 秦亚飞 李泰泉 JIN Hao;ZHANG Yu;QIN Yafei;LI Taiquan(Faculty of Mechanical and Electrical Engineering,Kunming University of Science and Technology,Kunming650504,)

机构地区：[1]昆明理工大学机电工程学院,云南昆明650504

出　　处：《电子元件与材料》2024年第4期402-410,共9页Electronic Components And Materials

基　　金：国家自然科学基金(52165066);云南省基础研究面上项目(202101AT070106)。

摘　　要：旨在设计并测试一种基于镓基液态金属的电容式柔性压力传感器。该传感器由镓基液态金属镓铟锡合金(Galinstan)、炭黑(CB)以及聚二甲基硅氧烷(PDMS)以牺牲模板法制作传感器介电层,同时通过丝网印刷技术将镓基液态金属共晶镓铟合金(EGaIn)印刷于普通织物上制备传感器电极。完成传感器封装后,对传感器进行各项传感性能的测试。测试结果表明,该传感器具备较高灵敏度(0.18 kPa^(-1)),低迟滞性,快速响应时间(140 ms)及恢复时间(180 ms),并展现出优良的循环耐久性和稳定性。此外,还探讨了该传感器在监测人体运动,如自行车踏频监测和步频监测等方面的潜在应用,证明其在运动分析和健康监测领域的有效性。通过这些实验和分析,证实了该传感器作为一种新型柔性压力传感器的可行性和应用潜力,为未来的研究和应用提供了有价值的参考。This study focuses on the development and evaluation of a capacitive flexible pressure sensor based on gallium-based liquid metal.The sensor was constructed using a gallium-indium-tin alloy known as Galinstan,combined with carbon black(CB)and polydimethylsiloxane(PDMS)to form the dielectric layer via sacrificial template methodology.Additionally,the electrodes for the sensor were created by screen-printing a gallium-based liquid metal eutectic gallium-indium alloy(EGaIn)onto the conventional fabric using screen printing technique.After the packaging,the sensing performance of the sensor were tested.This sensor exhibited high sensitivity at 0.18 kPa^(-1),minimal hysteresis,swift response time of 140 ms,and recovery time of 180 ms,alongside exceptional cyclic durability and stability.The potential applications of the sensor in human activity monitoring,exemplified by tracking bicycle pedaling frequency and walking pace were discussed,affirming its effectiveness in motion analysis and health surveillance.This work validates the feasibility and potential of this novel flexible pressure sensor,and insights for future research endeavors and practical implementations was provided.

关 键 词：镓基液态金属 电容式压力传感器 镓铟锡合金 炭黑 可穿戴设备 丝网印刷 运动监测 

分 类 号：TP212.9[自动化与计算机技术—检测技术与自动化装置]