二值振幅型远场超分辨消色差聚焦器件研究  

Study on binary-amplitude far-field super-resolution achromatic focusing devices

作　　者：武志翔[1,2] 李新羽 黄字文 邹依洋 熊亮[1] 邓琥[1,2] 尚丽平[1,2] Wu Zhi-Xiang;Li Xin-Yu;Huang Zi-Wen;Zou Yi-Yang;Xiong Liang;Deng Hu;Shang Li-Ping(School of Information Engineering,Southwest University of Science and Technology,Mianyang 621010,China;Joint Lab Extreme Condit Matter Properties,Southwest University of Science and Technology,Mianyang 621010,China;School of Manufacturing Science and Engineering,Southwest University of Science and Technology,Mianyang 621010,China)

机构地区：[1]西南科技大学信息工程学院,绵阳621010 [2]西南科技大学,极端条件物质特性联合实验室,绵阳621010 [3]西南科技大学制造科学与工程学院,绵阳621010

出　　处：《物理学报》2024年第10期153-161,共9页Acta Physica Sinica

基　　金：国家自然科学基金(批准号:62105271);四川省科技厅支撑计划(批准号:2020YJ0160);西安近代化工研究所开放基金(批准号:SYJJ20210411);西南科技大学博士基金项目(批准号:19zx7160)资助的课题。

摘　　要：具有远场超分辨聚焦特性、消色差、小尺寸和易加工的光学聚焦器件在光学成像、光学显微和光刻等领域具有巨大应用潜力.本文提出了一种基于光学超振荡基本原理,结合角谱衍射理论和二进制粒子群算法的二值振幅型远场超分辨消色差聚焦器件设计方法.为了验证所提出设计方法,首先针对波长λ_(1)=405 nm,λ_(2)=532 nm和λ_(3)=632.8 nm的径向偏振光对二值振幅型远场超分辨聚焦器件振幅进行优化设计,再对三者振幅分布进行逻辑“与”操作,使其同时含有3个工作波长远场超分辨聚焦的振幅分布信息.仿真结果表明:在3个波长入射条件下相应的峰值半高全宽分别为0.441λ_(1) (0.179μm),0.469λ_(2 )(0.249μm)和0.427λ_(3) (0.270μm),低于阿贝衍射极限,实现了远场超分辨消色差聚焦,且同时聚焦较小的旁瓣比率(<15%).此类器件具有易加工、消色差和超分辨等优点,适用于光学系统微型化、集成化.所提出的设计方法可拓展至其他光学波段,并为相关光学研究领域提供核心聚焦器件.The far-field super-resolution focusing devices possess characteristics such as super-resolution focusing,achromatic,small size and easy machining,which make them highly promising in optical imaging,optical microscopy and lithography.In this work,we propose a binary-amplitude modulation-based method for generating far-field super-resolution achromatic focusing.By using the principles of optical super-oscillation,combined with angular spectral diffraction theory and binary particle swarm optimization(BPSO),we optimize the binary amplitude-type far-field super-resolution focusing devices,which have an identical radius of 100λbut different focal lengths:λ_(1)=405 nm,λ_(2)=532 nm and λ_(3)=632.8 nm,respectively.Additionally,an achromatic metalens is integrated by using Boolean AND operation.To assess the feasibility of our proposed approach,numerical simulations are conducted via COMSOL Multiphysics employing FEM analysis.The simulation results demonstrate that the generated spots are located at 25.105λ,25.106λ,and 25.105λ,respectively.The corresponding full width at half maximum(FWHM)values are 0.441λ_(1)(0.179μm),0.469λ_(2)(0.249μm)and 0.427λ_(3)(0.270μm),which are smaller than the Abbe diffraction limit,and the far-field super-resolution achromatic focusing is realized.The sidelobe ratios are at low levels,i.e.12.5%,12.6%,and 14.2%.The binary amplitude-type far-field super-resolution achromatic devices have the advantages of easy machining,achromatism and super-resolution,and are suitable for miniaturization and integration of optical systems.

关 键 词：光学超振荡 消色差 远场超分辨 角谱衍射 

分 类 号：O43[机械工程—光学工程]