离线磁控溅射制备ITO镀膜玻璃及其应用  

Application and Preparation of ITO Coated Glass by Offline Magnetron Sputtering

作　　者：陈大伟 CHEN Dawei(Xinyi Glass(Tianjin)Co.,Ltd.,Tianjin 301700,China)

机构地区：[1]信义玻璃(天津)有限公司,天津301700

出　　处：《玻璃》2024年第5期19-24,共6页Glass

摘　　要：低辐射镀膜玻璃具有良好的透光性、优异的隔热性、保温性,被广泛地应用到节能门窗及节能建筑领域。基于对离线磁控溅射生产ITO导电膜玻璃进行详细介绍,分析其制备工艺、产品特点,通过与常规含Ag的Low-E玻璃样品进行理化试验对比,在此工艺下制备的ITO镀膜玻璃透过率高、具有良好的耐酸碱腐蚀性和耐磨性,应用前景广阔。The dust removal system in modern flat glass factory has been paid more and more attention by all parties.Based on the characteristics of the main raw materials for making flat glass and the calculation principle of air volume and air pressure of dust removal system the problems that may be encountered in the selection of dust removal equipment and system design as well as the points that need attention are pointed out.The corresponding views at forward.

关 键 词：离线磁控溅射 ITO 镀膜玻璃 

分 类 号：TQ171[化学工程—玻璃工业]