温度不敏感的光纤双腔盐度传感器  

Temperature insensitive optical fiber dual-cavity salinity sensor

作　　者：李依潼 杨玉强 牟小光[3] 王骥[1,4] 高佳乐 LI Yitong;YANG Yuqiang;MU Xiaoguang;WANG Ji;GAO Jiale(Guangdong Provincial Key Laboratory of Intelligent Equipment for South China Sea Marine Ranching,Guangdong Ocean University,Zhanjiang 524088,China;Shenzhen Institute of Guangdong Ocean University,Shenzhen 518120,China;College of Mechanical Engineering,Guangdong Ocean University,Zhanjiang 524088,China;Research Center of Guangdong Smart Oceans Sensor Networks and Equipment Engineering,Guangdong Ocean University,Zhanjiang,524088 China)

机构地区：[1]广东海洋大学,广东省南海海洋牧场智能装备重点实验室,广东湛江524088 [2]广东海洋大学深圳研究院,广东深圳518120 [3]广东海洋大学机械工程学院,广东湛江524088 [4]广东海洋大学智慧海洋传感网及其装备工程技术研究中心,广东湛江524088

出　　处：《光学精密工程》2024年第9期1283-1292,共10页Optics and Precision Engineering

基　　金：广东省自然科学基金面上项目(No.2023A1515011212,No.2022A1515011603);深圳市基础研究面上项目(No.JCYJ20210324122813036,No.JCYJ20220530162200001);广东省普通高校重点领域专项(No.2021ZDZX1015);广东海洋大学科研启动经费资助项目(No.060302112009);广东海洋大学研究生教育创新计划资助项目(No.202328)。

摘　　要：针对光纤微腔盐度传感器的温度交叉敏感问题,设计了一种基于陶瓷插芯和氧化锆套筒相结合的开放式盐水腔,利用氧化锆的正热膨胀系数抵消盐水的负热光系数,补偿温度对盐度测量的影响。为进一步提高盐度检测灵敏度,将开放盐水腔和封闭空气腔并联,通过精确控制两腔的自由光谱范围,使干涉谱产生游标效应,利用游标现象实现盐度灵敏度放大。实验结果表明:盐水腔的温度灵敏度仅为0.025 nm/℃,远低于盐水热光系数导致的温度灵敏度(-0.35nm/℃);在0~3%的盐度内,并联双腔的盐度灵敏度达到了0.180 8 nm/%,比单个盐水腔的盐度灵敏度提高了10.5倍。该传感器具有易于制造、灵敏度高、性能稳定等优点,理论上可实现温度的完全补偿。Addressing the issue of temperature cross-sensitivity in fiber optic microcavity salinity sensors,a novel design featuring an open saltwater cavity constructed from a ceramic ferrule and zirconia sleeve has been developed.The positive thermal expansion coefficient of zirconia effectively counteracts the negative thermal and optical coefficients of seawater,thereby compensating for temperature fluctuations in salinity measurements. To enhance salinity detection sensitivity, the open saltwater cavity is paired in parallel witha closed air cavity. This configuration precisely controls the free spectral range of both cavities, inducing avernier effect that significantly boosts salinity sensitivity through this phenomenon. Experimental data indi⁃cate that the temperature sensitivity of the newly designed saltwater cavity is just 0.025 nm/℃, substantial⁃ly lower than the -0.35 nm/℃ sensitivity due to seawater's thermal and optical properties. Furthermore,within a salinity range of 0 to 3%, the sensitivity of the dual cavity system reaches 0.180 8 nm/%, whichis 10.5 times greater than that of a single saltwater cavity. The sensor offers benefits such as ease of manu⁃facturing, high sensitivity, and robust stability. Complete temperature compensation is theoretically achiev⁃able with this setup.

关 键 词：法布里-珀罗干涉仪 光纤传感器 盐度 温度补偿 

分 类 号：O436[机械工程—光学工程] TN253[理学—光学]