激光器封装耦合容差分析  

Analysis of Coupling Tolerance in Laser Packaging

作　　者：张彩 刘佳垚 王晴晴 ZHANG Cai;LIU Jiayao;WANG Qingqing(School of Intelligent and Electronic Engineering,Dalian Neusoft University of Information,Dalian 116000,China;Institute of Semiconductor,Chinese Academy of Sciences,Beijing 100083,China;Xinlianxin(Hebei Xiong’an)Technology Co.,Ltd.,Xiongan 050004,China)

机构地区：[1]大连东软信息学院智能与电子工程学院,辽宁大连116000 [2]中国科学院半导体研究所,北京100083 [3]芯联新(河北雄安)科技有限公司,河北雄安050004

出　　处：《发光学报》2024年第5期809-816,共8页Chinese Journal of Luminescence

基　　金：国家自然科学基金(62375257);国家重点研发计划项目(2020YFB2205901)。

摘　　要：传统高速100 G激光器一般采用长方形可伐合金壳体即BOX封装,成本较高;新兴的单波100 G激光器逐步采用同轴封装,在物料成本上可降低约50%,但由于同轴封装内部集成制冷器和使用单透镜方案,因此在光路控制方面存在公差和不确定性,导致激光器外形尺寸结构的差异,在后期光模块的装配中存在匹配问题,且不良率较高,批量生产控制成本较高。本研究通过理论分析和ZMAX仿真,分析了激光器长度与偏位容差的关系,讨论了耦合效率与激光器长度和偏位容差的变化趋势与控制方法;在理论分析和仿真结果的基础上,对激光器封装进行了实验验证;提出激光器长度和偏位容差的控制方法及解决方案,对实际批量生产中提高激光器耦合效率、降低成本、提高生产效率具有指导意义。Traditional high-speed 100 G lasers are generally by rectangular kovar alloy shells,also known as BOX packaging,which has high cost.Emerging single-wavelength 100 G lasers are gradually adopting coaxial packaging,which can reduce material costs by about 50%.However,due to the integrated refrigerator inside the coaxial package and the use of a single lens solution,there are tolerances for the above two in mass production.There are tolerances and uncertainties in the optical path control,resulting in differences in the size and structure of the laser’s appearance.This leads to matching issues during the assembly of the later optical modules,resulting in higher defect rates and higher costs of batch production control.In this study,the relationship between laser length and positional tolerance was analyzed through theoretical analysis and ZMAX simulations.The coupling efficiency was discussed in relation to the trends and control methods of laser length and positional tolerance.Experimental verification of laser packaging was conducted based on the theoretical analysis and simulation results.Furthermore,control methods and solutions for laser length and positional tolerance were proposed,which have guiding significance for improving laser coupling efficiency,reducing costs,and increasing production efficiency in actual batch production.

关 键 词：激光器 耦合效率 ZMAX 容差 

分 类 号：TN248[电子电信—物理电子学]