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作 者:韩彤彤 穆全全[1,2,3] 彭增辉 刘永刚[1,2,3] 李大禹 于洋[1,2,3] 王启东 HAN Tongtong;MU Quangquang;PENG Zenghui;LIU Yonggang;LI Dayu;YU Yang;WANG Qidong(Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences,Changchun 130033,China;State Key Laboratory of Applied Optics,Changchun 130033,China;Key Laboratory of Optical System Advanced Manufacturing Technology,Chinese Academy of Sciences,Changchun 130033,China)
机构地区:[1]中国科学院长春光学精密机械与物理研究所,吉林长春130033 [2]应用光学国家重点实验室,吉林长春130033 [3]中国科学院光学系统先进制造技术重点实验室,吉林长春130033
出 处:《液晶与显示》2024年第5期561-568,共8页Chinese Journal of Liquid Crystals and Displays
基 金:国家自然科学基金(No.U2241224,No.11974345,No.61975202,No.U2030101)。
摘 要:光控取向技术一直是液晶光学器件制备中的关键环节,精确测量光控取向技术中的锚定强度与曝光条件的关系对于提高器件性能至关重要。然而,目前锚定强度的测量方法还存在一定的局限性,比如无法实现对同一取向膜的单点前后多状态的测量等,这导致实际应用中的诸多不便。鉴于此,本文提出了一种基于相位检测原理的新型方位锚定能测量方法,通过采用微分归一化拟合的方法同时结合全方位透射特性校正有效消除了起始放置误差,不仅极大地优化了测量过程,使测量误差控制在8%以内,而且大幅提高了测量时效性。理论与实验结果表明,该方法能够快速有效地测量光控取向膜锚定能随曝光参数的变化,具有较高的准确性和稳定性,能够为液晶光学元件的精密制造过程提供实时在线监测手段,对掌握光控取向物理过程和提高制造质量至关重要。Light control orientation technology has always been a crucial aspect of liquid crystal optical device fabrication,and precise measurement of the relationship between the anchoring strength and exposure conditions in light control orientation technology is vital for improving device performance.However,current methods for measuring anchoring strength have certain limitations,such as the inability to achieve multi-state measurements before and after a single-point orientation film,leading to inconvenience in practical applications.In this regard,this paper proposes a novel measurement method for azimuthal anchoring energy based on the phase detection principle.The method utilizes a differential normalization fitting approach,combined with correction for the omnidirectional transmission characteristics,effectively eliminating initial placement errors.This not only optimizes the measurement process,keeping the measurement error within 8%,but also significantly improves measurement efficiency.Theoretical and experimental results indicate that this method can rapidly and effectively measure the anchoring energy of light control orientation films with changes in exposure parameters,exhibiting high accuracy and stability.It can provide real-time online monitoring means for the precise manufacturing process of liquid crystal optical components,playing a crucial role in understanding the physical processes of light control orientation and enhancing manufacturing quality.
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