Power-efficient programmable integrated multiport photonic interferometer in CMOS-compatible silicon nitride  

作　　者：SHUQING LIN YANFENG ZHANG ZHAOYANG WU SHIHAO ZENG QING GAO JIAQI LI XIAOQUN YU SIYUAN YU 

机构地区：[1]State Key Laboratory of Optoelectronic Materials and Technologies,School of Electronics and Information Technology,Sun Yat-sen University,Guangzhou 510275,China [2]Hefei National Laboratory,Hefei 230088,China

出　　处：《Photonics Research》2024年第3期I0011-I0020,共10页光子学研究（英文版）

基　　金：Innovation Program for Quantum Science and Technology(2021ZD0301400);National Natural Science Foundation of China(61975243,62335019);Science and Technology Program of Guangzhou(202103030001)。

摘　　要：Silicon nitride(SiNx)is an appealing waveguide material choice for large-scale,high-performance photonic integrated circuits(PICs)due to its low optical loss.However,SiNx PICs require high electric power to realize optical reconfiguration via the weak thermo-optic effect,which limits their scalability in terms of device density and chip power dissipation.We report a 6-mode programmable interferometer PIC operating at the wavelength of 1550 nm on a CMOS-compatible low-temperature inductance coupled plasma chemical vapor deposition(ICP-CVD)silicon nitride platform.By employing suspended thermo-optic phase shifters,the PIC achieves 2×improvement in compactness and 10×enhancement in power efficiency compared to conventional devices.Reconfigurable 6-dimensional linear transformations are demonstrated including cyclic transformations and arbitrary unitary matrices.This work demonstrates the feasibility of fabricating power-efficient large-scale reconfigurable PICs on the low-temperature ICP-CVD silicon nitride platform.

关 键 词：UNITARY ARBITRARY figuration 

分 类 号：TN432[电子电信—微电子学与固体电子学] TN256