基于PDMS增敏空芯微瓶谐振腔的高灵敏温度传感器  

Highly Sensitive Temperature Sensor Based on PDMS Sensitized Hollow Micro-cavity Resonator

作　　者：梁中伟 陈彧芳 鹿姚 陈新玉 汪静丽[1] 万洪丹[1] Liang Zhongwei;Chen Yufang;Lu Yao;Chen Xinyu;Wang Jingli;Wan Hongdan(College of Electronic and Optical Engineering&College of Flexible Electronics(Future Technology),Nanjing University of Posts and Telecommunications,Nanjing 210023,Jiangsu,China)

机构地区：[1]南京邮电大学电子与光学工程学院,柔性电子(未来技术)学院,江苏南京210023

出　　处：《中国激光》2024年第5期174-181,共8页Chinese Journal of Lasers

基　　金：国家自然科学基金(12174199,11704199);中国博士后科学基金(2021M701765);江苏省自然科学基金面上项目(BK20221330);江苏省青蓝工程优秀青年骨干教师计划;江苏省研究生实践创新计划(SJCX21_0275);江苏省研究生创新基金(KYCX22_0912);江苏省研究生创新基金(KYCX22_0911)。

摘　　要：提出并实现了一种基于聚二甲基硅氧烷(PDMS)增敏空芯微瓶谐振腔(PS-HCMR)的高灵敏温度传感器。采用提拉镀膜法在高Q值(~7.83×10^(7))PS-HCMR表面均匀涂敷一层PDMS薄膜以实现热敏功能化,基于PS-HCMR回音壁模共振谱的热敏感性以及PDMS的高热光效应和热膨胀效应,实现了对温度信号的高灵敏度感知与测量。实验结果表明:当膜层厚度为150μm时,温度灵敏度可达0.127 nm·℃^(-1),相比于纯SiO_(2)HCMR提高了32倍。所提出的PS-HCMR的温度传感器具有灵敏度高、制备简单、结构紧凑等优势,在工业化控制、电力系统、环境监测等领域中具有良好的应用前景。Objective Fiber-optic temperature sensors with light waves as the carrier and optical fibers as the medium are used to transmit and sense temperature signals.Compared with traditional sensors,fiber-optic temperature sensors have high information capacity,antielectromagnetic interference,anticorrosion properties,high measurement accuracy,and safety,along with being explosion proof.They are applied in various fields,such as national defense,military,civil engineering,energy,environmental protection,and medical health.Compared with fiber-optic temperature sensors,such as fiber gratings and Fabry-Perot interferometers,micro-cavity temperature sensors have the advantages of small size,high resolution,fast response time,and low cost.For pure SiO_(2) microcavities,the improvement in temperature sensitivity is limited by the poor thermal sensitivity of the quartz material.Results of previous studies demonstrate that combining SiO_(2) micro-cavities with thermally sensitive materials is effective for improving temperature sensitivity.Methods In this study,a highly sensitive temperature sensor based on a polydimethylsiloxane(PDMS)sensitized hollow-core micro-cavity resonator(PS-HCMR)is developed and implemented.Based on the thermal sensitivity of PS-HCMR wall mode resonance spectrum and the high thermal optical effect and thermal expansion effect of PDMS,the high sensitivity perception and measurement of temperature are achieved.The temperature sensitivity of the HCMR is measured at 27-33℃by coating 50-μm and 150-μm thick PDMS films on the HCMR using a coating method.An experimental comparison with the temperature sensitivities of a solid-core micro-cavity resonator(SCMR)and pure SiO_(2) HCMR(Table 1)is performed to verify the high-sensitivity temperaturesensing performance of the PS-HCMR and the effect of PDMS film thickness on the HCMR.The thermal sensitivity effects of higherorder-mode whispering gallery mode(WGM)in micro-cavities with different PDMS film thicknesses are compared theoretically and experimentally.Res

关 键 词：传感器 微腔 聚二甲基硅氧烷 增敏空芯微瓶谐振腔 回音壁模式 热光效应 温度灵敏度 

分 类 号：TN248.1[电子电信—物理电子学]