微柱镜面周期性纹理结构衍射杂散光研究  

Diffractive Stray Light of Periodic Texture of Micro⁃cylindrical Lens

作　　者：孙昊[1] 唐乐 王春艳[1] 张为国[3,4] 杜春雷 夏良平 Sun Hao;Tang Le;Wang Chunyan;Zhang Weiguo;Du Chunlei;Xia Liangping(School of Opto-electronic Engineering,Changchun University of Science and Technology,Changchun 130022,Jilin,China;Key Laboratory of Micro Nano Optoelectronic Devices and Intelligent Perception Systems,Yangtze Normal University,Chongqing 408100,China;Research Center for Micro-Nano Manufacturing and System Integration,Chongqing Institute of Green and Intelligent Technology,Chinese Academy of Sciences,Chongqing 400714,China;Zhuhai Multiscale Optoelectronics Technology Co.,Ltd.,Zhuhai 519060,Guangdong,China)

机构地区：[1]长春理工大学光电工程学院,吉林长春130022 [2]长江师范学院微纳光电器件与智能感知系统重点实验室,重庆408100 [3]中国科学院重庆绿色智能技术研究院微纳制造与系统集成研究中心,重庆400714 [4]珠海迈时光电科技有限公司,广东珠海519060

出　　处：《中国激光》2024年第5期245-250,共6页Chinese Journal of Lasers

基　　金：吉林省教育厅科学研究项目(JJKH20220755KJ);重庆市自然科学基金(CSTB2022NSCQ-LZX0056);重庆市教委项目(KJZD-K202101403,KJCX2020049,HZ2021014,CXQT20027)。

摘　　要：为分析车床加工百微米级口径微柱透镜时遗留周期性刀纹产生的杂散光影响,构建了周期结构模型,分析了表面周期性纹理结构对衍射杂散光的影响。利用傅里叶光学理论建立了该结构的衍射理论模型,计算了在不同深度下的衍射光场强度分布规律,所获得的理论结果与商业光学软件VirtualLab的物理光学仿真和实验测试结果基本一致,实现了对理论模型的理论与实验验证,为进一步解决该类光学器件中周期性加工刀纹产生的衍射杂散光问题提供了理论依据,对微柱透镜的高精度加工具有指导意义。Objective In the field of optics,micro-cylindrical lenses and cylindrical lens arrays are commonly used optical devices usually processed by traditional mechanical grinding,ultraprecision turning,and die forming.In the process of diamond lathe machining,the tool machining step often has a constant period,resulting in the formation of a periodic texture structure corresponding to the knife pattern on the lens surface.This structure causes an obvious diffraction phenomenon under strong laser irradiation and produces stray light that interferes with the optical path in the optical system,seriously affecting the function of the optical system.However,there are few reports on this phenomenon at present,resulting in a lack of theoretical guidance for solving this problem.Methods To analyze the influence of stray light on the surface of a 100-μm-diameter micro-cylindrical lens caused by lathe machining,a model of the periodic texture structure is constructed,and the influence of the surface periodic texture structure on diffractive stray light is analyzed.The theoretical diffraction model of the structure is established by using Fourier optical theory,and the intensity distribution rules of the diffracted light field at different depths are calculated.The theoretical rules obtained are basically consistent with the physical optics simulation and experimental test results of the commercial optical software VirtualLab,and the theoretical model is verified theoretically and experimentally.Results and Discussions Based on the model of the periodic texture structure,the light spots of the ideal lens are compared with those of the lens with the periodic texture structure.As shown in Fig.5,compared with those of the ideal lens,the light spots of the lens with the periodic texture structure produce obvious diffractive stray light along the fast axis direction.In view of this phenomenon,the beam intensity distributions are calculated and simulated at different depths of the periodic texture structure on the surface of the micro

关 键 词：衍射 周期性纹理 微柱透镜 傅里叶光学 杂散光 

分 类 号：N34[自然科学总论]