基于高阶抑制达曼光栅的微透镜阵列焦距的快速测量  

Fast Measurement of Focal Length of Microlens Arrays Using High-Order-Suppression Dammann Gratings

作　　者：郑奉禄 余俊杰[1,3] 朱镕威 马国庆 张军勇 Zheng Fenglu;Yu Junjie;Zhu Rongwei;Ma Guoqing;Zhang Junyong(Photonic Integrated Circuits Center,Shanghai Institute of Optics and Fine Mechanics,Chinese Academy of Sciences,Shanghai 201800,China;ShanghaiTech University,Shanghai 201210,China;University of Chinese Academy of Sciences,Beijing 100049,China;Joint Laboratory of High Power Laser and Physics,Shanghai Institute of Optics and Fine Mechanics,Chinese Academy of Sciences,Shanghai 201800,China)

机构地区：[1]中国科学院上海光学精密机械研究所光芯片集成研发中心,上海201800 [2]上海科技大学,上海201210 [3]中国科学院大学,北京100049 [4]中国科学院上海光学精密机械研究所高功率激光物理联合实验室,上海201899

出　　处：《中国激光》2024年第6期124-131,共8页Chinese Journal of Lasers

基　　金：上海市自然科学基金(20ZR1464700);上海市超精密光学加工与检测专业技术服务平台、国家自然科学基金(62175245)。

摘　　要：提出了一种用高阶抑制二维达曼光栅作为分光元件替代普通衍射光栅实现微透镜阵列焦距快速测量的方法。高阶抑制二维达曼光栅具有优良的分光效果,且高阶衍射级次能够得到有效抑制,通过信噪比的提高降低焦距测量误差。设计并制备了一分五的高阶抑制二维达曼光栅,分束后的光束经过微透镜,在其焦面附近形成高对比聚焦光斑阵列。相比常规一维光栅,所提方法通过测量每个微透镜焦面内光斑两两之间的距离,得到多个焦距值,从而有效减少测量的随机误差。实验结果表明,该方案对微透镜阵列焦距的单次测量误差小于3.5%,重复测量误差在4.5%之内。该方案对微透镜阵列的焦距分布快速评估具有实用价值。Objective Microlens array is one of the most important components in micro-optics,and it has been widely used in many fields.It is becoming more and more important to achieve higher measurement accuracy and faster measurement speed of the microlens array focal length.Traditional measurement methods such as interferometer measurement,microscope measurement,light intensity measurement,etc.,are difficult to meet the requirements of high precision and rapid measurement simultaneously.Because the traditional scanning angle method needs to rotate the light tube or lenses,and the movement of the light spot cannot be determined in a single measurement,the measurement result is easy to be affected by the measuring device.Therefore,the scanning angle method based on multi-slit diffraction grating uses the multi-slit diffraction principle to determine the focal length by calculating the distance between adjacent orders,which improves the measurement efficiency.However,a single measurement can only obtain a single focal length value in this scheme,and it is still necessary to implement multiple measurements to eliminate various random errors.In addition,the non-negligible high diffraction orders of the traditional grating will introduce additional measurement noise,which will deteriorate the positioning accuracy of the centroids of those desired spots,resulting in the deterioration of the final accuracy.So,in order to eliminate random errors,multiple measurements have to be implemented in practice.To address the above problems,a fast focal length measurement scheme based on high-order-suppression Dammann gratings(HOSDGs)rather than traditional gratings is proposed in this paper.Methods In this study,a specially designed HOSDG is used to measure the focal length of the microlens.After the beam passes through the HOSDG,the diffractive light transmits through the microlens,and finally the camera receives the focused spot of each sublens on its focal plane.The distribution of the focus spots of each sublens is related to the foc

关 键 词：测量 高阶抑制达曼光栅 微透镜阵列 焦距测量 

分 类 号：O436[机械工程—光学工程]