AlGaN基深紫外LED新型透明电极芯片及阵列器件消毒效率研究  

AlGaN-Based Deep-UV LED with Novel Transparent Electrodes and Integrated Array Device for Efficient Disinfection

作　　者：林泽锋 余路成 周其程 蔡叶杭 苏法文 黄生荣 许飞雅 陈小红 李凌 蔡端俊 Lin Zefeng;Yu Lucheng;Zhou Qicheng;Cai Yehang;Su Fawen;Huang Shengrong;Xu Feiya;Chen Xiaohong;Li Ling;Cai Duanjun(Fujian Key Laboratory of Semiconductor Materials and Applications,College of Physical Science and Technology,Xiamen University,Xiamen 361005,Fujian,China;State Key Laboratory of Marine Environmental Science,College of Ocean and Earth Sciences,Xiamen University,Xiamen 361102,Fujian,China;Xiamen Yaoguang Semiconductor Technology Co.Ltd.,Xiamen 361006,Fujian,China)

机构地区：[1]厦门大学物理科学与技术学院福建省半导体材料与应用重点实验室,福建厦门361005 [2]厦门大学海洋与地球学院近海海洋环境科学国家重点实验室,福建厦门361102 [3]厦门瑶光半导体科技有限公司,福建厦门361006

出　　处：《激光与光电子学进展》2024年第5期451-458,共8页Laser & Optoelectronics Progress

基　　金：国家重点研发计划(2022YFB3604904);国家自然科学基金(62074133,61974124,61974125,11804115);福建省科技计划项目(2022H0058)。

摘　　要：2019年新冠疫情席卷全球,给人类社会带来了巨大的影响和经济损失。AlGaN基深紫外发光二极管(DUVLED)作为新型高效消杀器件,引起了学术界广泛的研究,其中,深紫外透明电极对提升深紫外LED的光电性能至关重要。采用一种新型的高透明度(>90%)铜基核壳结构金属纳米丝(Cu@metal NSs)电极,实现深紫外LED光输出功率近一倍的提升。基于深紫外LED的阵列排布及配光优化,集成制造了180 mW深紫外LED消毒灯模组,经生物实验验证,对大肠杆菌及金黄色葡萄球菌的灭活率大于99.99%。更重要的是,高功率消毒器械对新型冠状病毒表现出大于99.9%的灭活性能。本工作有望推动未来新型结构的深紫外发光器件制造及其高效消杀应用。The COVID-19 pandemic since 2019 has brought huge impacts and economic losses to the world.AlGaNbased deep-ultraviolet light emitting diode(DUV-LED)as a new and efficient sterilization device has attracted broad research attentions.The transparent electrode covering deep-UV band plays an important role in improving the performance of deep-UV LEDs.Here,we propose a novel core-shell structure Cu@metal nanosilks(Cu@metal NSs)network electrode with high transparency(>90%)to enhance the output power of deep-UV LED.In addition,based on the optimized design of integrated array module of deep-UV LEDs,a 180 mW DUV-LED sterilization device is fabricated.The device shows high inactivation performance for Escherichia coli and Staphylococcus aureus(>99.99%)and for COVID-19 virus(>99.9%).This work provides a novel method for improving the performance of deep-UV LEDs and pushing forward the efficient sterilization applications.

关 键 词：深紫外发光二极管 透明电极 金属纳米丝 杀菌消毒效率 

分 类 号：O439[机械工程—光学工程]