基于法布里-珀罗干涉和反共振效应的光纤温湿度传感器  

Fiber-Optic Temperature and Humidity Sensor Based on Fabry-Perot Interference and Anti-Resonance Effect

作　　者：胡子怡 常建华[1,2] 金澳博 陈鸣 徐遥 Hu Ziyi;Chang Jianhua;Jin Aobo;Chen Ming;Xu Yao(School of Electronics&Information Engineering,Nanjing University of Information Science&Technology,Nanjing 210044,Jiangsu,China;Collaborative Innovation Center of Atmospheric Environment and Equipment Technology,Nanjing University of Information Science&Technology,Nanjing 210044,Jiangsu,China)

机构地区：[1]南京信息工程大学电子与信息工程学院,江苏南京210044 [2]南京信息工程大学江苏省大气环境与装备技术协同创新中心,江苏南京210044

出　　处：《光学学报》2024年第5期261-270,共10页Acta Optica Sinica

基　　金：国家自然科学基金(62175114,62375137)。

摘　　要：提出并制备了一种基于法布里-珀罗干涉仪(FPI)和反共振(AR)效应的光纤温湿度传感器。将单模光纤(SMF)和端面固化了聚酰亚胺(PI)的带涂层无芯光纤(NCF)插入非封闭硅管两端构建FPI,利用具有相似光程的空气腔和空气-PI混合腔产生光谱叠加的游标效应,显著提高相对湿度检测灵敏度。NCF包层的光和部分折射进丙烯酸树脂涂层的光耦合形成AR,利用温度引起涂层折射率的改变导致AR非透射波长产生漂移,实现对温度的高灵敏度测量。实验结果表明:在10%~80%的相对湿度范围内,相对湿度灵敏度为510.25 pm/%;在26~35℃的温度范围内,温度灵敏度可达-4.48 nm/℃。该传感器具有成本低、灵敏度高的优点,在生物医学、健康监测等方面具有重要的应用价值。Objective The temperature and relative humidity(RH)measurement plays a crucial role in various fields such as food processing,environmental monitoring,and biomedical applications.Fiber optic sensors have been extensively studied due to their prominent advantages of low cost,small size,strong immunity to electromagnetic interference,and high sensitivity compared to traditional electronic hygrometers.Fiber optic sensors based on the Fabry-Perot interferometer(FPI)structure feature simple fabrication process and stable performance.However,previously proposed fiber optic temperature and humidity sensors exhibit low sensitivity or are limited to single-parameter measurements.Therefore,the development of temperature and humidity dual-parameter sensors with stable performance and high sensitivity holds practical significance.The cascaded structure allows for the connection of multiple fiber optic sensing units,enabling simultaneous multi-parameter measurement.The vernier effect is utilized to amplify the humidity measurement sensitivity,while the anti-resonance(AR)effect of polymer-coated no-core fiber(NCF)provides high temperature measurement sensitivity.We propose and fabricate an FPI cascaded AR temperature and humidity dual-parameter fiber optic sensor,which further enhances the temperature and humidity measurement sensitivity and eliminates the need for complex FFT demodulation processes.Methods The sensor is composed of cascading an Fabry-Perot(FP)cavity and an NCF with a polymer coating.Meanwhile,the single mode fiber(SMF)and the NCF with polyimide(PI)cured on its end-face are placed into a nonenclosed silicon tube.The non-enclosed silicon allows the humidity-sensitive material PI to have sufficient contact with water molecules in the air.The air cavity is selected as the sensing cavity,while the air-PI mixed cavity serves as the reference cavity.The superimposition of the spectra from the air cavity and the air-PI mixed cavity produces a vernier effect,enabling easy and highly sensitive RH measurement by trackin

关 键 词：传感器 光纤传感器 温湿度 游标效应 法布里-珀罗干涉仪 反共振 

分 类 号：TN25[电子电信—物理电子学]