基于氧化锌薄膜声表面波器件的细胞富集方法  

Cell enrichment method based on zinc oxide thin film surface acoustic wave device

作　　者：李英银 周伟[1] 彭本贤[1] 张春秋 全浩 孟龙[1] LI Yingyin;ZHOU Wei;PENG Benxian;ZHANG Chunqiu;QUAN Hao;MENG Long(Paul C.Lauterbur Research Center for Biomedical Imaging,Shenzhen Institute of Advanced Technology,Chinese Academy of Sciences,Shenzhen 518055;College of Medicine and Biological Information Engineering,Northeastern University,Shenyang 110004)

机构地区：[1]中国科学院深圳先进技术研究院劳特伯生物医学成像研究中心,深圳518055 [2]东北大学医学与生物信息工程学院,沈阳110004

出　　处：《声学学报》2024年第3期398-402,共5页Acta Acustica

基　　金：国家自然科学基金项目(12227809)资助。

摘　　要：针对常见的铌酸锂等压电单晶在高温易碎裂且不能弯曲等问题,提出了一种区别于传统压电单晶富集细胞的方法。通过磁控溅射技术在硅衬底上制备了厚度为3.83μm的氧化锌薄膜,并用扫描电子显微镜与X射线衍射表征了薄膜性能,在薄膜表面制备了频率为195 MHz的叉指换能器,插入损耗为-33.8 dB,且仿真分析了该器件的声场。结果表明,表面波声束集中在换能器声孔径处,液滴位于声束边缘。实验结果表明,该器件能够驱动液滴产生3.9×10^(-3)m/s流速的涡旋,并在20 s内富集了悬浮于液滴中的微球和人体淋巴细胞,将液滴中细胞的浓度提升55倍。To address common issues such as fragility and lack of flexibility at high temperatures in traditional piezoelectric single crystals like LiNbO 3,an approach diverging from conventional cell-enrichment piezoelectric crystals is proposed.This approach involves the fabrication of a zinc oxide(ZnO)film,approximately 3.83μm thick,on a silicon substrate using magnetron sputtering technology.The performance of the film was characterized using scanning electron microscopy(SEM)and X-ray diffraction(XRD).Furthermore,a 195 MHz interdigital transducer(IDT)was prepared on the film’s surface,exhibiting an insertion loss of−33.8 dB.The acoustic field of the device was simulated and analyzed.The results show that the surface wave acoustic beam is concentrated at the acoustic aperture of the transducer,and the droplets are located at the edge of the acoustic beam.Experimental findings demonstrated that the device was capable of inducing droplet vortex formation with a flow velocity of 3.9×10^(−3) m/s.Moreover,the device effectively enriched suspended microspheres and human lymphocytes within the droplet,resulting in a 55-fold increase in cell concentration within 20 seconds.

关 键 词：声表面波 声镊 声流 氧化锌 压电基底 细胞富集 

分 类 号：TN65[电子电信—电路与系统] R318[医药卫生—生物医学工程]