调频连续波激光多路并行相干精密长度测量方法  

Multiline parallel precision coherent length measurement of frequency modulation continuous wave LiDAR

作　　者：胡申博 刘俊辰 余苏 杨承昱 曲兴华[1,2] 张福民 Hu Shenbo;Liu Junchen;Yu Su;Yang Chengyu;Qu Xinghua;Zhang Fumin(School of Precision Instrument and Opto-Electronics Engineering,Tianjin University,Tianjin 300072,China;National Key Laboratory of Precision Testing Technology and Instruments,Tianjin University,Tianjin 300000,China;Erzhong(Deyang)Heavy Equipment Co.,Ltd,Deyang,Sichuan 618000,China)

机构地区：[1]天津大学精密仪器与光电子工程学院,天津300072 [2]天津大学精密测试技术及仪器全国重点实验室,天津300000 [3]二重(德阳)重型装备有限公司,四川德阳618000

出　　处：《光电工程》2024年第3期106-114,共9页Opto-Electronic Engineering

基　　金：国家自然科学基金资助项目(52035013)。

摘　　要：面向航空航天等大型复杂机电系统,长度测量的需求从单独的一维位移测量发展到多目标、灵活便于拓展的多路并行测量。调频连续波激光雷达长度测量技术具备抗干扰、精度高、无合作等优势。本文基于调频连续波激光雷达技术开展多路并行相干精密长度测量方法研究,针对传统长度测量系统存在光纤色散、辅助路光纤漂移导致长度测量精度降低问题,提出一种含有氰化氢气体吸收池的三光路马赫-曾德尔干涉测量系统,在此基础上,基于光开关结构实现精密长度多路并行测量。通过精密导轨长度测量实验结果表明,提出的方法在3.6 m长度范围内标准差不超过25μm,实现了四路并行长度测量。与商用激光干涉仪测量结果比较,多路测量结果的绝对误差不超过30μm。For large complex electromechanical systems such as aeronautics and astronautics,the demand for length measurement has also evolved from one-dimensional displacement measurement to multi-objective,flexible and extensible multiline parallel measurement.The frequency-modulated continuous-wave lidar length measurement technology has the advantages of anti-interference,high precision and no cooperation.In this paper,a multiline parallel coherent precision length measurement method based on frequency modulation continuous wave laser lidar is studied.To solve the problem of fiber dispersion and auxiliary fiber drift in the traditional length measurement system,a three-channel Mach-Zehnder interferometry system containing a hydrogen cyanide gas absorption cell is proposed.On this basis,the precision length multiline parallel measurement is realized based on the optical switch structure.The experimental results of precision guide rail length measurement show that the proposed method is less than 25μm in the length range of 3.6 m.The four-way parallel length measurement is realized.The absolute error of the multi-channel measurement results is not more than 30μm compared with the measurement results of a commercial laser interferometer.

关 键 词：调频连续波 HCN气体吸收池 光开关 长度测量 

分 类 号：TN958.98[电子电信—信号与信息处理]