FPGA and computer-vision-based atom tracking technology for scanning probe microscopy  

作　　者：俞风度 刘利 王肃珂 张新彪 雷乐 黄远志 马瑞松 郇庆 Feng-Du Yu;Li Liu;Su-Ke Wang;Xin-Biao Zhang;Le Lei;Yuan-Zhi Huang;Rui-Song Ma;Qing Huan(Beijing National Laboratory for Condensed Matter Physics,Institute of Physics,Chinese Academy of Sciences,Beijing 100190,China;University of Chinese Academy of Sciences,Beijing 100049,China;ACME (Beijing) Technology Co.,Ltd.,Beijing 101407,China;Key Laboratory for Vacuum Physics,University of Chinese Academy of Sciences,Beijing 100190,China)

机构地区：[1]Beijing National Laboratory for Condensed Matter Physics,Institute of Physics,Chinese Academy of Sciences,Beijing 100190,China [2]University of Chinese Academy of Sciences,Beijing 100049,China [3]ACME (Beijing) Technology Co.,Ltd.,Beijing 101407,China [4]Key Laboratory for Vacuum Physics,University of Chinese Academy of Sciences,Beijing 100190,China

出　　处：《Chinese Physics B》2024年第5期76-85,共10页中国物理B（英文版）

基　　金：Project supported by the National Science Fund for Distinguished Young Scholars(Grant No.T2125014);the Special Fund for Research on National Major Research Instruments of the National Natural Science Foundation of China(Grant No.11927808);the CAS Key Technology Research and Development Team Project(Grant No.GJJSTD20200005)。

摘　　要：Atom tracking technology enhanced with innovative algorithms has been implemented in this study,utilizing a comprehensive suite of controllers and software independently developed domestically.Leveraging an on-board field-programmable gate array(FPGA)with a core frequency of 100 MHz,our system facilitates reading and writing operations across 16 channels,performing discrete incremental proportional-integral-derivative(PID)calculations within 3.4 microseconds.Building upon this foundation,gradient and extremum algorithms are further integrated,incorporating circular and spiral scanning modes with a horizontal movement accuracy of 0.38 pm.This integration enhances the real-time performance and significantly increases the accuracy of atom tracking.Atom tracking achieves an equivalent precision of at least 142 pm on a highly oriented pyrolytic graphite(HOPG)surface under room temperature atmospheric conditions.Through applying computer vision and image processing algorithms,atom tracking can be used when scanning a large area.The techniques primarily consist of two algorithms:the region of interest(ROI)-based feature matching algorithm,which achieves 97.92%accuracy,and the feature description-based matching algorithm,with an impressive 99.99%accuracy.Both implementation approaches have been tested for scanner drift measurements,and these technologies are scalable and applicable in various domains of scanning probe microscopy with broad application prospects in the field of nanoengineering.

关 键 词：atom tracking FPGA computer vision drift measurement 

分 类 号：TN791[电子电信—电路与系统] TP391.41[自动化与计算机技术—计算机应用技术] TH742[自动化与计算机技术—计算机科学与技术]