三维体声波滤波器芯片电-力-热耦合建模与仿真  

Electro-mechanic-thermal coupling modeling and simulation for 3D BAW filter chip

作　　者：陈士涛 洪思成 赵烁 汪伟[2] 赖志国 左成杰 CHEN Shitao;HONG Sicheng;ZHAO Shuo;WANG Wei;LAI Zhiguo;ZUO Chengjie(Information Materials and Intelligent Sensing Laboratory of Anhui Province,Anhui University,Hefei 230601,China;East China Research Institute of Electronic Engineering,Hefei 230088,China;Suzhou Hantianxia Electronics Co.,Ltd.,Suzhou 215000,China;School of Microelectronics,University of Science and Technology of China,Hefei 230026,China)

机构地区：[1]安徽大学,信息材料与智能感知安徽省实验室,安徽合肥230601 [2]华东电子工程研究所,安徽合肥230088 [3]苏州汉天下电子有限公司,江苏苏州215000 [4]中国科学技术大学微电子学院,安徽合肥230026

出　　处：《中国高新科技》2024年第8期84-85,94,共3页

基　　金：国家自然科学基金青年项目(62001002);安徽省博士后基金(2022A573)。

摘　　要：为了直接、高效地建模和分析实际复杂的三维(3D)体声波(BAW)滤波器结构电-力-热耦合效应,文章采用一种基于有限元方法的电-力-热耦合算法。首先,建模BAW滤波器的3D几何模型,设置几何结构内部的材料属性以及材料参数。其次,构建基于有限元(FEM)算法的固体力学和静电场耦合的电-力耦合算法。然后,在电-力耦合算法基础之上考虑BAW滤波器内部由于压电材料在工作过程中机械损耗产生的热耗散问题,建立直接求解的电-力-热耦合算法。该电-力-热耦合算法使用COMOSL软件内部的一种新型自主化的画网格技术。最终,得出一个工作带宽在2.27~2.44GHz,带内损耗在3dB以内,带外抑制在-20dB以下的BAW滤波器内部电-力-热耦合仿真结果。In order to directly and efficiently model and analyze the electro-mechanic-thermal coupling effect of complex three-dimensional(3D)bulk acoustic wave(BAW)filter structures,an muti-physical electro-mechanic-thermal coupling algorithm based on finite element(FEM)method is utilized in this paper.Firstly,a 3D BAW filter geometric model is built and material properties are set inside the geometric structure.Secondly,the electro-mechanical coupling algorithm of solid mechanics and static field coupling is constructed based on FEM method.Then,the heat dissipation problem is considered,which is caused by the mechanical loss of piezoelectric material in the working process of the BAW filter,and the muti-physical electro-mechanic-thermal coupling algorithm is established to directly solve the above problem.A new autonomous grid mesh technique is used in the muti-physical coupling algorithm.Finally,electro-mechanic-thermal coupling simulation results of BAW filter are given with an operating bandwidth of 2.27-2.44GHz,in-band loss within 3dB and out-of-band suppression below-20dB.

关 键 词：BAW滤波器 有限元方法 电-力-热耦合算法 力-热分析 

分 类 号：TN967[电子电信—信号与信息处理]