低损耗铌酸盐微波介质陶瓷的制备与性能  

Preparation and property of low loss niobate microwave dielectric ceramics

作　　者：郑浩然 邱蓉 杨盼 赵晓芳[2] 于仕辉 ZHENG Haoran;QIU Rong;YANG Pan;ZHAO Xiaofang;YU Shihui(School of Automotive and Engineering Machinery,Guangdong Communication Polytechnic,Guangzhou 510000,China;International School of Microelectronics,Dongguan University of Technology,Dongguan 523000,China;College of Electronics and Information Engineering,Shenzhen University,Shenzhen 518000,China;School of Electrical Engineering and Automation,Luoyang Institute of Science and Technology,Luoyang 471000,China)

机构地区：[1]广东交通职业技术学院汽车与工程机械学院,广州510000 [2]东莞理工学院国际微电子学院,东莞523000 [3]深圳大学电子与信息工程学院,深圳518000 [4]洛阳理工学院电气工程与自动化学院,洛阳471000

出　　处：《粉末冶金材料科学与工程》2024年第2期133-138,150,共7页Materials Science and Engineering of Powder Metallurgy

基　　金：东莞市科技特派员项目(20231800500262);广东省普通高校青年创新人才项目(2023KQNCX188);国家自然科学基金面上项目(52175525)。

摘　　要：为了获得更低损耗的铌酸盐基微波介质陶瓷,本文以ZnO、GeO_(2)、MoO_(3)和Nb_(2)O_(5)为主要原料,采用固相反应合成法制备Zn[(Ge_(0.5)Mo_(0.5))_(x)Nb_(1−x)]_(2)O_(6)(x=0.05、0.10、0.15、0.20)铌酸盐微波介质陶瓷。采用XRD、SEM以及矢量网络分析仪分别表征材料的物相组成、微观形貌及介电性能。结果表明:烧结温度为1180℃时,x=0.05的微波介质陶瓷表面形貌最为致密,相对密度最大(94.58%),具有较好的微波介电性能,介电常数ε_(r)为21.7,品质因数Q_(f)为64610 GHz,谐振频率温度系数τ_(f)为−81.2×10^(−6)/℃。In order to obtain niobate-based microwave dielectric ceramics with lower loss,Zn[(Ge_(0.5)Mo_(0.5))_(x)Nb_(1−x)]_(2)O_(6)(x=0.05、0.10、0.15、0.20)niobate microwave dielectric ceramics were prepared by solid-state reaction method with ZnO,GeO2,MoO3,and Nb2O5 as main raw materials.XRD,SEM,and vector network analyzer were used to characterize the phase composition,microscopic morphologies,and dielectric properties of materials,respectively.The results show that when the sintering temperature is 1180℃,the surface morphology of microwave dielectric ceramics with x=0.05 is the most compact,with the maximum relative density of 94.58%,and has good microwave dielectric properties,dielectric constantε_(r) is 21.7,quality factor Q_(f) is 64610 GHz,and temperature coefficient of resonant frequencyτ_(f) is−81.2×10^(−6)/℃.

关 键 词：微波介质陶瓷 铌酸盐 微波介电性能 物相组成 微观结构 

分 类 号：TQ174.1[化学工程—陶瓷工业]