基于流导法的G-M制冷机低温泵抽速测试与分析  

Measurement and Analysis of Pumping Speed of G-M Refrigerator Cryopump Based on the Orifice Method

作　　者：余彦飞 李晓刚 胡湘娥 陈进文 陈洁心 YU Yan-fei;LI Xiao-gang;HU Xiang-e;CHEN Jin-wen;CHEN Jie-xin(Zhongshan Kaixuan Vacuum Science&Technology Co.,Ltd.,Zhongshan 528478,China)

机构地区：[1]中山凯旋真空科技股份有限公司,广东中山528478

出　　处：《真空》2024年第3期20-25,共6页Vacuum

基　　金：广东省重点领域研发计划项目(2021B0101300004)。

摘　　要：抽气速率是衡量低温泵产品抽真空性能优劣的重要指标之一。除国内企业常用的流量法外,流导法亦是测量低温泵抽速的重要方法。本文依据现行标准中所规定的基于流导法原理测试真空泵气体抽速的方法,对ZD-200口径G-M制冷机低温泵对不同气体抽速测试进行了详细介绍。结果表明:流导法测得低温泵对N^(2)和Ar的抽速分别为2410 L/s、1884 L/s,明显优于国内外同类产品指标;低温泵对H^(2)抽速为2577 L/s,与国内外产品公开技术指标处于相同水平。依照流导法获得的测试结果具有较高的准确度和可信度。Pumping speed is an important index to measure the pumping performance of cryopump.The throughput method is generally used to measure the pumping speed of cryopump in China.In addition,the orifice method is also an important method for measuring the cryopump pumping speed.In this paper,detailed introduction of pumping speed test for different gases of ZD-200 caliber cryopump was conducted based on the orifice method specified in the current standards.The results show that the pumping speed of cryopump for N^(2) and Ar are 2410 L/s and 1884 L/s respectively,which are significantly better than the indicators of similar products at home and abroad.The pumping speed of cryopump for H^(2) is 2577 L/s,which is at the same level as the technical indicators of domestic and foreign products.The test results obtained by the orifice method have high accuracy and credibility.

关 键 词：G-M制冷机低温泵 流导法 抽速测试 性能分析 

分 类 号：TB752.53[一般工业技术—真空技术]