差压法测定NEG吸氢性能  

Measurement of Hydrogen Absorption Performance of NEG by Differential Pressure Methods

作　　者：王婧华 王蓝陵 林文豫 吴俊 曹青 王旭迪[1] WANG Jing-hua;WANG Lan-ling;LIN Wen-yu;WU Jun;CAO Qing;WANG Xu-di(School of Mechanical Engineering,Hefei University of Technology,Hefei 230009,China)

机构地区：[1]合肥工业大学机械工程学院,安徽合肥230009

出　　处：《真空》2024年第3期51-56,共6页Vacuum

基　　金：国家自然科学基金资助项目(62101172)。

摘　　要：通过对定压法进行改进提出了差压法,用于测试非蒸散型吸气剂(NEG)的吸氢性能。该方法在进气室和吸气室之间安装固定流导元件,利用调节微调阀提供可控的进气流量,通过测量吸气室、进气室和参考室的压力计算NEG的吸气性能参数。利用两种NEG比较了差压法和改进的定压法所测吸气性能。结果表明:差压法测得的吸气容量比改进的定压法测得的吸气容量低0.07268 Pa·L;腔室壁面吸附能力使改进定压法的试验结果高于理论结果,而差压法的试验结果不受影响;对改进的定压法进行优化后,其计算结果与差压法的接近。差压法可以获得更准确、更有效的吸气剂性能参数,在差压法中,参考部分和试验部分同时进行测试,可缩短测试时间,减少控制进气带来的误差。By improving the constant pressure method,the differential pressure method was proposed to test the hydrogen absorption performance of non-evaporable getter(NEG).A constant conductance element is installed between the gas room and the induction chamber to provide controllable inlet flow with micrometering valve.The sorption performance parameters of NEG can be calculated by measuring the pressure of induction chamber,gas room and reference chamber.The sorption performance of two NEG absorbers measured by the improved constant pressure method and differential pressure method were compared during sorption test.The results show that the sorption capacity measured by differential pressure method is 0.07268 Pa·L lower than that measured by improved constant pressure method.The suction of clean chamber wall leads to higher test results of the improved constant pressure method than the actual result,while the test results of the differential pressure method are not affected,and the results of the modified improved constant pressure method are close to those of the differential pressure method.The differential pressure method can obtain more accurate and effective performance parameters of getters.In the differential pressure method,the reference part and the experimental part are tested at the same time,which can shorten the test time and reduce the error caused by inlet controlling.

关 键 词：差压法 吸氢性能 非蒸散型吸气剂(NEG) 改进的定压法 

分 类 号：TB771[一般工业技术—真空技术]