140 GHz回旋管用金刚石输能窗研制  

Development of the Diamond Energy Transfer Window for 140 GHz Cyclotron

作　　者：刘林 方有维 高察 王建 罗积润 LIU Lin;FANG You-wei;GAO Cha;WANG Jian;LUO Ji-run(Aeraspace Information Research Institute,Chinese Academy of Sciences,Beijing 100190,China)

机构地区：[1]中国科学院空天信息创新研究院,北京100190

出　　处：《真空》2024年第3期100-104,共5页Vacuum

基　　金：中国科学院高功率微波源与技术重点实验室基金项目(CXJJ-16S004)。

摘　　要：为满足长脉冲高功率回旋管振荡器研制的需求,研究了大尺寸(窗片直径100 mm)金刚石窗组件的制备工艺及质量可靠性。通过热力学仿真软件计算封接应力分布,得出采用封接宽度为3 mm的双面平封封接结构时窗片所受应力最小。采用Ti-Ag-Cu活性钎焊和电子束高能焊接相结合的方式,研制出气密封接的金刚石窗组件。该大尺寸金刚石窗组件的介电性能良好,能够承受550℃/48 h热烘烤试验,且金刚石-无氧铜封接件平均抗拉强度达118.2 MPa,满足回旋管使用要求。In order to meet the requirements for the development of long-pulse high-power cyclotron oscillator,the preparation process and quality reliability of large-size(100 mm diameter slices)diamond window assemblies were studied.The sealing stress distribution is calculated by thermodynamic simulation software,and it is concluded that the window slices are subjected to the lowest stress when the sealing width is 3 mm with double-sided flat sealing structure.The diamond window assembly with airtight sealing is developed by combining Ti-Ag-Cu active brazing and electron beam high-energy welding.The large-size diamond window assembly has good dielectric properties,can withstand 550℃/48 h hot baking test,and the average tensile strength of the diamond-oxygen free copper sealing part reaches 118.2 MPa,which meets the requirements for the use of cyclotron tubes.

关 键 词：回旋管 金刚石 输能窗 活性钎料 高温钎焊 

分 类 号：TB756[一般工业技术—真空技术]