基于轴向电涡流效应的高精度长位移传感器  

High-precision long-displacement sensor based on axial eddy current effect

作　　者：徐笠杰 王艳林[1] 陈青山[1] Xu Lijie;Wang Yanlin;Chen Qingshan(School of Instrument Science and Optoelectronic Engineering,Beijing Information Science and Technology University,Beijing 100192,China)

机构地区：[1]北京信息科技大学仪器科学与光电工程学院,北京100192

出　　处：《电子测量技术》2024年第6期131-136,共6页Electronic Measurement Technology

基　　金：光电信息控制和安全技术重点实验室项目(202105509)资助。

摘　　要：为了实现大行程精密光学调焦组件的高精度实时检测,研究基于轴向电涡流效应的高精度长位移传感器。建立了长位移电涡流探头仿真模型进行线性度测试,搭建电涡流传感器测试系统进行精度实验,并将长位移电涡流传感器接入精密光学调焦组件。实验结果表明:在可测量位移达到24 mm的同时,线性度优于1%,分辨率优于0.5μm,精度优于1μm,高精度长位移电涡流传感器符合精密光学调焦组件的需求。In order to realize high-precision real-time detection of large-stroke precision optical focusing components In order to realize high-precision real-time detection of large-stroke precision optical focusing components,high-precision long-displacement sensors based on axial eddy current effect are studied.A long-displacement eddy current probe simulation model is established for linearity testing,an eddy current sensor test system is built for accuracy experiments,and the long-displacement eddy current sensor is connected to the precision optical focusing assembly.The experimental results show that while the measurable displacement reaches 24 mm,the linearity is better than 1%,the resolution is better than 0.5μm,the accuracy is better than 1μm,and the high-precision long-displacement eddy current sensor meets the requirements of the precision optical focusing assembly.

关 键 词：电涡流传感器 轴向电涡流效应 精密光学调焦组件 长位移 高精度 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]