哈特曼-夏克波前传感器高精度球面波标定方法研究  

High-precision spherical wavefront calibration method for shack-hartmann wavefront sensor

作　　者：包明帝 史国华 邢利娜[1,2] 何益 BAO Ming-di;SHI Guo-hua;XING Li-na;HE Yi(School of Biomedical Engineering(Suzhou),University of Science and Technology of China,Suzhou 215163,China;Suzhou Institute of Biomedical Engineering and Technology,Chinese Academy of Sciences,Suzhou 215163,China)

机构地区：[1]中国科学技术大学生物医学工程学院(苏州),江苏苏州215163 [2]中国科学院苏州生物医学工程技术研究所,江苏苏州215163

出　　处：《中国光学（中英文）》2024年第3期521-527,共7页Chinese Optics

基　　金：国家自然科学基金资助项目(No.62075235);国家重点研发计划项目(No.2021YFF0700700);中国科学院青年创新促进会(No.2019320);中国科学院战略性先导科技专项(No.XDA16021304)。

摘　　要：为解决哈特曼-夏克波前传感器传统标定方法存在的测量精度低、稳定性不足等问题,提出了一种基于球面波的哈特曼-夏克波前传感器高精度绝对标定方法。通过理论推导获取了球面波的高精度标定方法,结合搭建的球面波标定实验装置,对子孔径数为128×128的哈特曼-夏克波前传感器完成高精度标定。该方法计算得到了哈特曼-夏克波前传感器结构参数f,w以及L_(0)的精确值。对标定后的哈特曼-夏克波前传感器的测量精度进行测试,实验结果表明,经本文方法标定后的哈特曼-夏克波前传感器的波前复原精度达到了PV=1.376×10^(-2)λ,RMS=4×10^(-3)λ(λ=625 nm),重复性精度为PV=3.2×10^(-3)λ,RMS=9.76×10^(-4)λ(λ=625 nm)。该方法可以为大口径的SHWFS完成高精度标定,提升测量精度。To address the issues of low measurement accuracy and insufficient stability in traditional calibration methods for Shack-Hartmann wavefront sensors(SHWFS),we propose a high-precision absolute calibration method using spherical waves generated by sensor.A high-precision calibration method for spherical waves was obtained through theoretical derivation.Combined with the constructed spherical wave calibration experimental device,high-precision calibration was performed on the SHWFS with sub apertures of 128×128.The structural parameters of the SHWFS(f,w,and L_(0))are calculated precisely.The measurement accuracy of the SHWFS is verified after calibration.The experimental results demonstrate that by using this method to calibrate the SHWFS,its wavefront recovery accuracy reaches a PV of 1.376×10^(-2)λand an RMS of 4×10^(-3)λ(whereλ=625 nm),respectively.Additionally,its repeatability accuracy reaches a PV of 3.2×10^(-3)λand an RMS of 9.76×10^(-4)λ(whereλ=625 nm),respectively.These findings suggest that this method is suitable for enhancing the measurement accuracy of high-precision calibration of SHWFS with large aperture.

关 键 词：哈特曼-夏克波前传感器 绝对标定 球面波前 

分 类 号：TP741[自动化与计算机技术—检测技术与自动化装置]