磁控溅射时长对复合羟基磷灰石涂层性能的影响  

Effect of Magnetron Sputtering Duration on Properties of Composite Hydroxyapatite Coating

作　　者：张明权 吴兵[1] 唐正强[1] 李屹[1] ZHANG Mingquan;WU Bing;TANG Zhengqiang;LI Yi(School of Mechanical Engineering,Guizhou University,Guiyang 550025,China)

机构地区：[1]贵州大学机械工程学院,贵州贵阳550025

出　　处：《热加工工艺》2024年第4期22-26,共5页Hot Working Technology

基　　金：贵州省科技计划项目(黔科合基础[2020]1Y415);贵州大学培育项目([2019]24号);贵州省科技创新人才团队项目(黔科合平台人才[2020]5020)。

摘　　要：采用射频磁控溅射技术在Ti-6Al-4V基体沉积复合羟基磷灰石(HA,Ca_(10)(PO_(4))_(6)(OH)_(2))涂层,研究掺杂Ti和TiN在不同HA溅射时长下对HA复合涂层微观结构、摩擦学性能、钙磷比(Ca/P)及电化学的影响。结果表明:复合HA涂层随着HA溅射时长增加,涂层表面的半球形颗粒状结晶体更明显,对细胞附着生长及生物相容性有重要影响;复合涂层主要由HA相、Ti相和TiN相组成,溅射时间越长的复合HA涂层物相更接近标准值,且涂层Ca/P随着溅射时间的增加逐渐接近标准值;摩擦系数随溅射时长的增加逐渐趋于稳定,涂层的摩擦磨损情况随溅射时间增加而逐渐减小;溅射时长最长的涂层获得了最低的腐蚀电流密度和最大的腐蚀电位。The composite hydroxyapatite(HA,Ca_(10)(PO_(4))_(6)(OH)_(2))coating was deposited on Ti-6Al-4V substrate by RF magnetron sputtering.The effects of sputtering duration on the microstructure,friction coefficient,calcium phosphorus ratio and electrochemistry properties of the composite HA coating were studied.The results show that with the increase of the sputtering duration,the hemispherical granular crystals on the surface of the composite HA coating are more obvious,which has an important impact on cell adhesion,growth and biocompatibility.The composite coating is mainly composed of HA phase,Ti phase and TiN phase.In addition,the Ca/P ratio is more and more close to the standard value of the hydroxyapatite with an increase in sputtering duration.The friction coefficient tends to be stable and the friction wear of the coating gradually decreases with the increasing sputtering time.The coating with the longest sputtering duration obtains the lowest corrosion current density and the largest corrosion potential.

关 键 词：羟基磷灰石 射频磁控溅射 钙磷比 摩擦磨损 电化学 

分 类 号：TG174.4[金属学及工艺—金属表面处理]