磁控溅射法制备钛镓锌氧化物透明导电膜的介电和光电性能研究  

The dielectric and opto-electronic properties of titanium-gallium-zinc oxide transparent conducting films prepared by magnetron-sputtering method

作　　者：陆轴 郭声彦 谢泉 LU Zhou;GUO Shengyan;XIE Quan(School of Physics and Electronic Science,Guizhou Education University,Guiyang 550018,China;Guizhou University,College of Big Data and Information Engineering,Guiyang 550025,China;Guizhou University,Renwu College,Guiyang 550025,China)

机构地区：[1]贵州师范学院物理与电子科学学院,贵阳550018 [2]贵州大学大数据与信息工程学院,贵阳550025 [3]贵州大学人武学院,贵阳550025

出　　处：《中南民族大学学报（自然科学版）》2024年第4期561-566,共6页Journal of South-Central University for Nationalities：Natural Science Edition

基　　金：贵州省科学技术基金资助项目(黔科合基础[2019]1248)。

摘　　要：采用磁控溅射技术制备了钛镓锌氧化物(TiGaZnO)透明导电膜,研究了衬底温度对薄膜样品介电、光电和结构性能的影响.结果表明:所制备的薄膜样品均为(002)择优取向的六角纤锌矿结构,并且衬底温度对薄膜性能具有明显的影响.当衬底温度为610 K时所制备的TiGaZnO薄膜具有较优的光电性能和结晶质量,对应的品质因数为1.23×10^(4)Ω^(-1)∙cm^(-1)、平均可见光透过率为86.85%、电阻率为5.76×10^(-4)Ω∙cm、平均晶粒尺寸为83.42 nm.另外,利用光谱拟合方法得到了TiGaZnO薄膜的光学常数,进一步研究了衬底温度对薄膜光学性质和介电性能的影响.结果表明TiGaZnO薄膜的折射率、介电常数和耗散系数均依赖于衬底温度.The transparent conducting films(TCFs)of titanium-gallium-zinc oxide(TiGaZnO)were fabricated by magnetron-sputtering technique.The dependence of dielectric,opto-electronic and structural properties of the TiGaZnO TCFs on substrate temperature was investigated.The results indicate that all the thin films have a wurtzite hexagonal crystal structure and(002)-preferred orientation.The substrate temperature has a significant impact on the film properties of the TiGaZnO TCFs.The sample fabricated at 610 K possesses the optimal opto-electronic performance and crystalline quality,with the highest quality factor,maximum average visible transmittance,lowest resistivity and largest average grain size of 1.23×10^(4)Ω^(-1)·cm^(-1),86.85%,5.76×10^(-4)Ω·cm and 83.42 nm,respectively.Moreover,the optical constants of the TiGaZnO TCFs were determined by the optical spectrum fitting method(OSFM).The influences of substrate temperature on the optical constants and dielectric properties were studied.The results demonstrate that the refractive index,dielectric constant and dissipation factor are dependent on the substrate temperature for the TiGaZnO TCFs.

关 键 词：透明导电膜 氧化锌 介电常数 光电性能 

分 类 号：TM914[电气工程—电力电子与电力传动]