叉指电极结构传感器的研究及应用进展  

Research and application progress of interdigital electrode structure sensors

作　　者：王艳霞 WANG Yanxia(Shaanxi Polytechnic Institute,Xianyang 712000,China)

机构地区：[1]陕西工业职业技术学院,陕西咸阳712000

出　　处：《传感器与微系统》2024年第6期6-10,共5页Transducer and Microsystem Technologies

基　　金：陕西省教育厅科学研究计划项目(23JK0310);陕西工业职业技术学院科研基金资助项目(2023YKYB-008)。

摘　　要：叉指电极传感器以其结构简单、灵敏度高、稳定性好等独特优点成为众多领域的研究热点。本文详细论述了叉指电极的工作原理、指标参数、检测原理、制备工艺和分布结构等,探讨了近几年叉指电极结构传感器在医学、环境、生物等行业的应用现状,重点分析在监测环境因素、人体运动状态和声表面波(SAW)技术等方面的最新研究技术,最后对其发展前景、趋势和挑战进行了分析和展望。Interdigital electrode(IDE)sensor has become a research hotspot in many fields because of its unique advantages such as simple structure,high sensitivity and good stability.Working principle,index parameters,detection principle,preparation technology and distribution structure of interdigital electrodes are discussed in detail,and the application status of interdigital electrode structure sensor in medicine,environment,biology and other industries in recent years is discussed.The latest research technology in monitoring environmental factors,human motion state and surface acoustic wave(SAW)technology is analyzed.Finally,the development prospect,trend and challenge are analyzed and prospected.

关 键 词：叉指电极 微超级电容器 可穿戴设备 声表面波 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]